Invention Grant
- Patent Title: Transistors patterned with electrostatic discharge protection and methods of fabrication
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Application No.: US16055365Application Date: 2018-08-06
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Publication No.: US10741542B2Publication Date: 2020-08-11
- Inventor: Chien-Hsin Lee , Xiangxiang Lu , Manjunatha Prabhu , Mahadeva Iyer Natarajan
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Thompson Hine LLP
- Agent Francois Pagette
- Main IPC: H01L27/02
- IPC: H01L27/02 ; H01L29/417 ; H01L29/06 ; H01L29/08 ; H01L29/78

Abstract:
High-voltage semiconductor devices with electrostatic discharge (ESD) protection and methods of fabrication are provided. The semiconductor devices include a plurality of transistors on a substrate patterned with one or more common gates extending across a portion of the substrate, and a plurality of first S/D contacts and a plurality of second S/D contacts associated with the common gate(s). The second S/D contacts are disposed over a plurality of carrier-doped regions within the substrate. One or more floating nodes are disposed above the substrate and, at least in part, between second S/D contacts to facilitate defining the plurality of carrier-doped regions within the substrate. For instance, the carrier-doped regions may be defined from a mask with a common carrier-region opening, with the floating node(s) intersecting the common carrier-region opening and facilitating defining, along with the common opening, the plurality of separate carrier-doped regions.
Public/Granted literature
- US20180342501A1 TRANSISTORS PATTERNED WITH ELECTROSTATIC DISCHARGE PROTECTION AND METHODS OF FABRICATION Public/Granted day:2018-11-29
Information query
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