Invention Grant
- Patent Title: Grating couplers with cladding layer(s)
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Application No.: US15945347Application Date: 2018-04-04
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Publication No.: US10746907B2Publication Date: 2020-08-18
- Inventor: Ajey Poovannummoottil Jacob , Yusheng Bian
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: G02B5/18
- IPC: G02B5/18 ; G02B6/30 ; G02B6/34

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to grating couplers with structured cladding and methods of manufacture. A structure includes: a grating coupler in a dielectric material; a back end of line (BEOL) multilayer stack over the dielectric material; and a multi-layered cladding structure of alternating materials directly on the BEOL multilayer stack.
Public/Granted literature
- US20190310399A1 GRATING COUPLERS WITH CLADDING LAYER(S) Public/Granted day:2019-10-10
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