Invention Grant
- Patent Title: MEMS devices and processes
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Application No.: US15987346Application Date: 2018-05-23
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Publication No.: US10750291B2Publication Date: 2020-08-18
- Inventor: Marek Sebastian Piechocinski , Richard Ian Laming , Tsjerk Hans Hoekstra , Colin Robert Jenkins , Axel Thomsen
- Applicant: Cirrus Logic International Semiconductor Ltd.
- Applicant Address: US TX Austin
- Assignee: Cirrus Logic, Inc.
- Current Assignee: Cirrus Logic, Inc.
- Current Assignee Address: US TX Austin
- Agency: Jackson Walker L.L.P.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@500f0bab
- Main IPC: H04R1/08
- IPC: H04R1/08 ; H04R9/08 ; H04R11/04 ; H04R17/02 ; H04R21/02 ; H04R19/04 ; B81B3/00 ; H04R19/00
Abstract:
The application describes MEMS transducers having a patterned membrane electrode which incorporates a plurality of openings or voids. A conductive element is provided on the surface of the underlying membrane within the opening.
Public/Granted literature
- US20180352339A1 MEMS DEVICES AND PROCESSES Public/Granted day:2018-12-06
Information query
