- 专利标题: Nanostructured article
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申请号: US16340472申请日: 2017-10-17
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公开(公告)号: US10756306B2公开(公告)日: 2020-08-25
- 发明人: Nicholas C. Erickson , Moses M. David , Xiaoguang Sun , Manoj Nirmal , Haeen Sykora , Hui Luo , Samuel J. Carpenter , Jilliann M. Nelson , Justin P. Meyer , Bert T. Chien , David J. Rowe , Robert L. Brott , David G. Freier , Hyacinth L. Lechuga
- 申请人: 3M INNOVATIVE PROPERTIES COMPANY
- 申请人地址: US MN St. Paul
- 专利权人: 3M Innovative Properties Company
- 当前专利权人: 3M Innovative Properties Company
- 当前专利权人地址: US MN St. Paul
- 代理商 Clifton F. Richardson
- 国际申请: PCT/US2017/056846 WO 20171017
- 国际公布: WO2018/080830 WO 20180503
- 主分类号: H01L51/52
- IPC分类号: H01L51/52 ; H01L27/32 ; H01L51/56 ; B81C1/00
摘要:
A nanostructured article having a first layer with a nanostructured surface is described. The nanostructured surface includes a plurality of pillars extending from a base surface of the first layer. The pillars have an average height greater than an average lateral dimension of the pillars. An average center-to-center spacing between pillars is no more than 2000 nm. The average lateral dimension is no less than 50 nm. Each pillar in the plurality of pillars has at least a lower portion and an upper portion where the lower portion is between the upper portion and the base surface, and the upper and lower portions have differing compositions. The nanostructured article includes a second layer disposed over the plurality of pillars and extending continuously to the base surface.
公开/授权文献
- US20190386251A1 NANOSTRUCTURED ARTICLE 公开/授权日:2019-12-19
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