发明授权
- 专利标题: Plating method, plating apparatus, and method for estimating limiting current density
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申请号: US16426079申请日: 2019-05-30
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公开(公告)号: US10760177B2公开(公告)日: 2020-09-01
- 发明人: Yasuyuki Masuda , Masashi Shimoyama
- 申请人: EBARA CORPORATION
- 申请人地址: JP Tokyo
- 专利权人: EBARA CORPORATION
- 当前专利权人: EBARA CORPORATION
- 当前专利权人地址: JP Tokyo
- 代理机构: Rothwell, Figg, Ernst & Manbeck, P.C.
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@26f151a0
- 主分类号: C25D21/12
- IPC分类号: C25D21/12 ; C25D7/12 ; C25D17/00
摘要:
A plating method for plating a substrate by increasing a current value from a predetermined current value to a first current value is provided. The plating method plates the substrate for a first predetermined period with the first current value when a first current density corresponding to the first current value is lower than a limiting current density. This plating method includes measuring a voltage value applied to the substrate, and when the current value is increased from the predetermined current value to the first current value, determining whether the first current density is equal to or more than the limiting current density or not based on an amount of change in the voltage value.
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