Invention Grant
- Patent Title: Rotated boundaries of stops and targets
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Application No.: US15083946Application Date: 2016-03-29
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Publication No.: US10761022B2Publication Date: 2020-09-01
- Inventor: Tzahi Grunzweig , Alexander Svizher
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llo
- Main IPC: G01N21/47
- IPC: G01N21/47 ; G03F7/20 ; G06F30/39 ; G01N21/956
Abstract:
A scatterometry metrology system, configured to measure diffraction signals from at least one target having respective at least one measurement direction, the scatterometry metrology system having at least one field stop having edges which are slanted with respect to the at least one measurement direction.
Public/Granted literature
- US20160209327A1 ROTATED BOUNDARIES OF STOPS AND TARGETS Public/Granted day:2016-07-21
Information query
