- 专利标题: Fabricating calcite nanofluidic channels
-
申请号: US16114906申请日: 2018-08-28
-
公开(公告)号: US10761428B2公开(公告)日: 2020-09-01
- 发明人: Dong Kyu Cha , Mohammed Badri AlOtaibi , Ali Abdallah Al-Yousef
- 申请人: Saudi Arabian Oil Company
- 申请人地址: SA Dhahran
- 专利权人: Saudi Arabian Oil Company
- 当前专利权人: Saudi Arabian Oil Company
- 当前专利权人地址: SA Dhahran
- 代理机构: Fish & Richardson P.C.
- 主分类号: C23C16/455
- IPC分类号: C23C16/455 ; G03F7/075 ; G03F7/40 ; G03F7/20
摘要:
A method for fabricating calcite channels in a nanofluidic device is described. A photoresist layer is coated onto a top surface of a silicon nitride (SiN) substrate. After coating the photoresist layer, the photoresist layer is scanned with an electron beam in a predefined pattern. The scanned photoresist is developed to expose portions of the top surface of the SiN substrate in the predefined pattern. Calcite is deposited in the predefined pattern using atomic layer deposition (ALD) using a calcite precursor gas. Using a solvent, a remaining portion of the photoresist layer is removed to expose the deposited calcite in the predefined pattern and on the top surface of the SiN substrate, where a width of the deposited calcite is in range from 50 to 100 nanometers (nm).
公开/授权文献
- US20200071824A1 FABRICATING CALCITE NANOFLUIDIC CHANNELS 公开/授权日:2020-03-05
信息查询
IPC分类: