Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16243837Application Date: 2019-01-09
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Publication No.: US10763278B2Publication Date: 2020-09-01
- Inventor: Kyunghwa Yun , Pansuk Kwak , Chanho Kim , Junghwa Lee
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine, Whitt & Francos, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@65b8518e
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/528 ; H01L23/535 ; H01L27/11573

Abstract:
A semiconductor memory device includes a substrate having a cell array region and a contact region, a stack structure including a plurality of gate electrodes on the cell array region and the contact region, a plurality of cell vertical channel structures extending through the stack structure on the cell array region, and a contact structure disposed beside of the stack structure on a top surface of the substrate and disposed along a line extending from the cell array region toward the contact region. The height of the contact structure on the cell array region is different from the height of the contact structure on the contact region.
Public/Granted literature
- US20190326319A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2019-10-24
Information query
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