Invention Grant
- Patent Title: Metal rail conductors for non-planar semiconductor devices
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Application No.: US16176072Application Date: 2018-10-31
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Publication No.: US10763365B2Publication Date: 2020-09-01
- Inventor: Chih-Liang Chen , Chih-Ming Lai , Ching-Wei Tsai , Charles Chew-Yuen Young , Jiann-Tyng Tzeng , Kuo-Cheng Ching , Ru-Gun Liu , Wei-Hao Wu , Yi-Hsiung Lin , Chia-Hao Chang , Lei-Chun Chou
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L29/78 ; H01L23/528 ; H01L27/088 ; H01L29/66 ; H01L23/535 ; H01L21/8234 ; H01L23/48 ; H01L29/417

Abstract:
The present disclosure describes various non-planar semiconductor devices, such as fin field-effect transistors (finFETs) to provide an example, having one or more metal rail conductors and various methods for fabricating these non-planar semiconductor devices. In some situations, the one or more metal rail conductors can be electrically connected to gate, source, and/or drain regions of these various non-planar semiconductor devices. In these situations, the one or more metal rail conductors can be utilized to electrically connect the gate, the source, and/or the drain regions of various non-planar semiconductor devices to other gate, source, and/or drain regions of various non-planar semiconductor devices and/or other semiconductor devices. However, in other situations, the one or more metal rail conductors can be isolated from the gate, the source, and/or the drain regions these various non-planar semiconductor devices. This isolation prevents electrical connection between the one or more metal rail conductors and the gate, the source, and/or the drain regions these various non-planar semiconductor devices.
Public/Granted literature
- US20190165177A1 METAL RAIL CONDUCTORS FOR NON-PLANAR SEMICONDUCTOR DEVICES Public/Granted day:2019-05-30
Information query
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