Invention Grant
- Patent Title: Process kit erosion and service life prediction
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Application No.: US16240318Application Date: 2019-01-04
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Publication No.: US10770321B2Publication Date: 2020-09-08
- Inventor: Kang-Lie Chiang , Greg A. Blackburn , Pallavi Zhang , Michael D. Armacost , Nitin Khurana
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan, LLP
- Main IPC: H01L21/67
- IPC: H01L21/67 ; G01R21/06 ; G01R19/165
Abstract:
Embodiments of the present disclosure provide a method, system, and computer program product for monitoring a service life of a chamber component. In one example, the method includes receiving one or more power measurements of a semiconductor processing chamber from one or more sensors positioned about the semiconductor processing chamber. The processor compares the one or more power measurements to one or more threshold values corresponding to the service life of the chamber component. The processor determines whether the one or more power measurements exceed the threshold values. If the processor determines that the one or more power measurements exceed the threshold values, the processor takes remedial measures for the service life of the chamber component.
Public/Granted literature
- US20190148194A1 PROCESS KIT EROSION AND SERVICE LIFE PREDICTION Public/Granted day:2019-05-16
Information query
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