Invention Grant
- Patent Title: Tunable narrow bandpass MEMS technology filter using an arch beam microresonator
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Application No.: US16318220Application Date: 2017-08-08
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Publication No.: US10771041B2Publication Date: 2020-09-08
- Inventor: Md Abdullah Al Hafiz , Mohammad Ibrahim Younis , Lakshmoji Kosuru
- Applicant: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Applicant Address: SA Thuwal
- Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee: KING ABDULLAH UNIVERSITY OF SCIENCE AND TECHNOLOGY
- Current Assignee Address: SA Thuwal
- Agency: Patent Portfolio Builders PLLC
- International Application: PCT/IB2017/054845 WO 20170808
- International Announcement: WO2018/033828 WO 20180222
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/24 ; H03H9/46

Abstract:
Embodiments of a tunable bandpass microelectromechanical (MEMS) filter are described. In one embodiment, such a filter includes a pair of arch beam microresonators, and a pair of voltage sources electrically coupled to apply a pair of adjustable voltage biases across respective ones of the pair of arch beam microresonators. The pair of voltage sources offer independent tuning of the bandwidth of the filter. Based on the structure and arrangement of the filter, it can be tunable by 125% or more by adjustment of the adjustable voltage bias. The filter also has a relatively low bandwidth distortion, can exhibit less than 2.5 dB passband ripple, and can exhibit sideband rejection in the range of at least 26 dB.
Public/Granted literature
- US20190165757A1 TUNABLE NARROW BANDPASS MEMS TECHNOLOGY FILTER USING AN ARCH BEAM MICRORESONATOR Public/Granted day:2019-05-30
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