Miniature fluid control device
Abstract:
A miniature fluid control device is provided and includes a gas inlet plate, a resonance plate and a piezoelectric actuator. The resonance plate is assembled and combined with the gas inlet plate. The piezoelectric actuator is assembled and combined with the resonance plate. The piezoelectric actuator includes a suspension plate, an outer frame, at least one bracket and a piezoelectric plate. The suspension plate has a first surface and a second surface. The outer frame is arranged around the suspension plate and has an assembling surface. The piezoelectric plate is attached on the second surface. The at least one bracket is formed between the suspension plate and the outer frame as making the first surface of the suspension plate non-coplanar with the assembling surface of the outer frame, so that a specific chamber spacing is maintained between the first surface of the suspension plate and the resonance plate.
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