Systems, apparatuses, and methods for implementing a speculative probe mechanism are disclosed. A system includes at least multiple processing nodes, a probe filter, and a coherent slave. The coherent slave includes an early probe cache to cache recent lookups to the probe filter. The early probe cache includes entries for regions of memory, wherein a region includes a plurality of cache lines. The coherent slave performs parallel lookups to the probe filter and the early probe cache responsive to receiving a memory request. An early probe is sent to a first processing node responsive to determining that a lookup to the early probe cache hits on a first entry identifying the first processing node as an owner of a first region targeted by the memory request and responsive to determining that a confidence indicator of the first entry is greater than a threshold.