Invention Grant
- Patent Title: Mounting member
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Application No.: US16069942Application Date: 2017-01-10
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Publication No.: US10777446B2Publication Date: 2020-09-15
- Inventor: Shotaro Masuda , Tomoaki Ichikawa , Yohei Maeno
- Applicant: NITTO DENKO CORPORATION
- Applicant Address: JP Osaka
- Assignee: NITTO DENKO CORPORATION
- Current Assignee: NITTO DENKO CORPORATION
- Current Assignee Address: JP Osaka
- Agency: Sughrue Mion, PLLC
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@66424dc4
- International Application: PCT/JP2017/000439 WO 20170110
- International Announcement: WO2017/122621 WO 20170720
- Main IPC: H01L21/687
- IPC: H01L21/687 ; H01L21/677 ; C01B32/158 ; H01L21/683 ; B65G49/07 ; C01B32/16 ; B82Y30/00 ; B82Y40/00

Abstract:
Provided is a mounting member that is excellent in low dusting property and hardly contaminates an object to be mounted while being excellent in gripping force and heat resistance. The mounting member of the present invention includes an aggregate of carbon nanotubes for forming a mounting surface, wherein when the mounting member is placed on a silicon wafer so that a carbon nanotube aggregate-side surface thereof is brought into contact with the silicon wafer, and the resultant is left to stand for 30 seconds while a load of 100 g is applied from above the mounting member, a number of particles each having a diameter of 0.2 μm or more transferred onto the silicon wafer is 100 particles/cm2 or less.
Public/Granted literature
- US20190027395A1 MOUNTING MEMBER Public/Granted day:2019-01-24
Information query
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