Invention Grant
- Patent Title: Three-dimensional measurement device
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Application No.: US16194576Application Date: 2018-11-19
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Publication No.: US10782122B2Publication Date: 2020-09-22
- Inventor: Hiroyuki Ishigaki , Takahiro Mamiya
- Applicant: CKD Corporation
- Applicant Address: JP Aichi
- Assignee: CKD CORPORATION
- Current Assignee: CKD CORPORATION
- Current Assignee Address: JP Aichi
- Agency: Osha Liang LLP
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@12fedaa8
- Main IPC: G01B11/24
- IPC: G01B11/24 ; G01N21/88 ; G01B11/02 ; G01B9/02 ; G01N21/956 ; G01B11/22 ; G02B27/28

Abstract:
A three-dimensional measurement device includes: an optical system that splits incident light into two lights, radiates one of the two lights as measurement light to a measurement object and the other as reference light to a reference surface, and recombines the two lights to emit combined light; a first irradiation unit that emits first light entering the optical system; a second irradiation unit that emits second light entering the optical system; a first imaging unit into which output light that is obtained from the first light and is emitted from the optical system enters; a second imaging unit into which output light that is obtained from the second light and is emitted from the optical system enters; and an image processor that executes three-dimensional measurement of the measurement object, based on interference fringe images taken by the first imaging unit and the second imaging unit.
Public/Granted literature
- US20190094016A1 THREE-DIMENSIONAL MEASUREMENT DEVICE Public/Granted day:2019-03-28
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