Invention Grant

Force sensor
Abstract:
A force sensor including a first surface and a second surface facing each other in a first direction; a first protrusion protruded from the first surface toward the second surface; a first electrode on the first protrusion; a first force sensing layer on the first electrode; a second protrusion protruded from the second surface toward the first surface; and a second electrode on the second protrusion, wherein the first protrusion and the second protrusion are not overlapped with each other or are partially overlapped with each other.
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