- 专利标题: IC manufacturing recipe similarity evaluation methods and systems
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申请号: US15882138申请日: 2018-01-29
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公开(公告)号: US10783290B2公开(公告)日: 2020-09-22
- 发明人: Kang-Heng Ma , Ching-Hsi Nan
- 申请人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 申请人地址: TW Hsinchu
- 专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- 当前专利权人地址: TW Hsinchu
- 代理机构: Hautpman Ham, LLP
- 主分类号: G06F30/30
- IPC分类号: G06F30/30 ; G05B19/4063 ; G05B19/418 ; G05B23/02 ; G06F3/0481 ; G06F11/00
摘要:
A method includes, for a first tool-log variable of a set of tool-log variables, comparing a first tool-log variable result from a first integrated circuit (IC) manufacturing recipe to a first tool-log variable result from a second IC manufacturing recipe. The set of tool-log variables corresponds to one or more tool-logs generated from execution of the first IC manufacturing recipe and the second IC manufacturing recipe on an IC manufacturing tool. Based on the comparison, a first tool-log variable similarity value for the first tool-log variable is assigned, and, based on the first tool-log variable similarity value, a recipe similarity value for the first IC manufacturing recipe and the second IC manufacturing recipe is calculated. At least one of comparing the first tool-log variable results, assigning the first tool-log variable similarity value, or calculating the recipe similarity value is performed by a processing device.
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