IC manufacturing recipe similarity evaluation methods and systems
摘要:
A method includes, for a first tool-log variable of a set of tool-log variables, comparing a first tool-log variable result from a first integrated circuit (IC) manufacturing recipe to a first tool-log variable result from a second IC manufacturing recipe. The set of tool-log variables corresponds to one or more tool-logs generated from execution of the first IC manufacturing recipe and the second IC manufacturing recipe on an IC manufacturing tool. Based on the comparison, a first tool-log variable similarity value for the first tool-log variable is assigned, and, based on the first tool-log variable similarity value, a recipe similarity value for the first IC manufacturing recipe and the second IC manufacturing recipe is calculated. At least one of comparing the first tool-log variable results, assigning the first tool-log variable similarity value, or calculating the recipe similarity value is performed by a processing device.
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