- 专利标题: Silicon photonics based fiber coupler
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申请号: US16245076申请日: 2019-01-10
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公开(公告)号: US10788638B2公开(公告)日: 2020-09-29
- 发明人: Radhakrishnan L. Nagarajan , Masaki Kato
- 申请人: INPHI CORPORATION
- 申请人地址: US CA Santa Clara
- 专利权人: INPHI CORPORATION
- 当前专利权人: INPHI CORPORATION
- 当前专利权人地址: US CA Santa Clara
- 代理机构: Ogawa P.C.
- 代理商 Richard T. Ogawa
- 主分类号: G02B6/43
- IPC分类号: G02B6/43 ; G02B6/42 ; G02B6/122 ; G02B6/12
摘要:
A silicon-based edge coupler for coupling a fiber with a waveguide includes a cantilever member being partially suspended with its anchored end coupled to a silicon photonics die in a first part of a silicon substrate and a free end terminated near an edge region separating a second part of the silicon substrate from the first part. The edge coupler further includes a mechanical stopper formed at the edge region with a gap distance ahead of the free end of the cantilever member. Additionally, a V-groove is formed in the second part of the silicon substrate characterized by a top opening and a bottom plane symmetrically connected by two sloped side walls along a fixed Si-crystallography angle. The V-groove is configured to support a fiber with an end facet being pushed against the mechanical stopper and a core center being aligned with the free end of the cantilever member.
公开/授权文献
- US20200225429A1 SILICON PHOTONICS BASED FIBER COUPLER 公开/授权日:2020-07-16
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