Invention Grant
- Patent Title: Electostatic filter and method for controlling ion beam using electostatic filter
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Application No.: US16197238Application Date: 2018-11-20
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Publication No.: US10790116B2Publication Date: 2020-09-29
- Inventor: Alexandre Likhanskii , Frank Sinclair , Shengwu Chang
- Applicant: APPLIED Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/12 ; H01J37/08
Abstract:
An apparatus may include a main chamber, the main chamber comprising a plurality of electrodes; an entrance tunnel, the entrance tunnel having an entrance axis extending into the main chamber along a first direction; and an exit tunnel, connected to the main chamber and defining an exit axis, wherein the entrance axis and the exit axis define a beam bend of at least 30 degrees therebetween.
Public/Granted literature
- US20200161089A1 ELECTOSTATIC FILTER AND METHOD FOR CONTROLLING ION BEAM USING ELECTOSTATIC FILTER Public/Granted day:2020-05-21
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