- 专利标题: Ion implantation apparatus and measurement device
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申请号: US16363678申请日: 2019-03-25
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公开(公告)号: US10790117B2公开(公告)日: 2020-09-29
- 发明人: Yoshiaki Inda
- 申请人: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- 申请人地址: JP Tokyo
- 专利权人: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- 当前专利权人: SUMITOMO HEAVY INDUSTRIES ION TECHNOLOGY CO., LTD.
- 当前专利权人地址: JP Tokyo
- 代理机构: Michael Best & Friedrich LLP
- 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@66ed00dc
- 主分类号: H01J37/31
- IPC分类号: H01J37/31 ; H01J37/244 ; H01J37/317
摘要:
An ion implantation apparatus includes a first angle measuring instrument configured to measure angle information on an ion beam in a first direction, a second angle measuring instrument configured to measure angle information on the ion beam in a second direction, a relative movement mechanism configured to change relative positions of the first angle measuring instrument and the second angle measuring instrument with respect to the ion beam in a predetermined relative movement direction, and a control device configured to calculate angle information on the ion beam in a third direction perpendicular to both a beam traveling direction and the relative movement direction based on the angle information on the ion beam in the first direction measured by the first angle measuring instrument and the angle information on the ion beam in the second direction measured by the second angle measuring instrument.
公开/授权文献
- US20190295818A1 ION IMPLANTATION APPARATUS AND MEASUREMENT DEVICE 公开/授权日:2019-09-26
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