Invention Grant
- Patent Title: Electrostatic chuck with variable pixelated magnetic field
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Application No.: US16576645Application Date: 2019-09-19
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Publication No.: US10790180B2Publication Date: 2020-09-29
- Inventor: Chih-Hsun Hsu , Tza-Jing Gung , Benjamin Schwarz , Shahid Rauf , Ankur Agarwal , Vijay D. Parkhe , Michael D. Willwerth , Zhiqiang Guo
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L21/683
- IPC: H01L21/683 ; H01J37/32
Abstract:
Electrostatic chucks with variable pixelated magnetic field are described. For example, an electrostatic chuck (ESC) includes a ceramic plate having a front surface and a back surface, the front surface for supporting a wafer or substrate. A base is coupled to the back surface of the ceramic plate. A plurality of electromagnets is disposed in the base, the plurality of electromagnets configured to provide pixelated magnetic field tuning capability for the ESC.
Public/Granted literature
- US20200013661A1 ELECTROSTATIC CHUCK WITH VARIABLE PIXELATED MAGNETIC FIELD Public/Granted day:2020-01-09
Information query
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