Invention Grant
- Patent Title: Fin structures
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Application No.: US16058494Application Date: 2018-08-08
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Publication No.: US10790198B2Publication Date: 2020-09-29
- Inventor: Fuad H. Al-Amoody , Yiheng Xu , Rishikesh Krishnan
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Roberts Calderon Safran & Cole, P.C.
- Agent Francois Pagette; Andrew M. Calderon
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L21/8234 ; H01L21/762 ; H01L21/02

Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to fin structures and methods of manufacture. The structure includes: a plurality of fin structures formed of substrate material; a semiconductor material located between selected fin structures of the plurality of fin structures; and isolation regions within spaces between the plurality of fin structures.
Public/Granted literature
- US20200051867A1 FIN STRUCTURES Public/Granted day:2020-02-13
Information query
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