- 专利标题： Pick and place machine cleaning system and method
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申请号： US16460935申请日： 2019-07-02
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公开(公告)号： US10792713B1公开(公告)日： 2020-10-06
- 发明人: Alan E. Humphrey , Bret A. Humphrey , Jerry J. Broz , Wayne C. Smith
- 申请人： International Test Solutions, Inc.
- 申请人地址： US NV Reno
- 专利权人： International Test Solutions, Inc.
- 当前专利权人： International Test Solutions, Inc.
- 当前专利权人地址： US NV Reno
- 主分类号： B08B7/00
- IPC分类号： B08B7/00 ; B65G45/10 ; B65G47/91 ; H01L21/67
摘要：
A device, mechanism, and methodology for regular and consistent cleaning of the vacuum aperture, nozzle, and contacting surfaces of a pick-and-place apparatus and the pick-up tools of automated or manual semiconductor device and die handling machines are disclosed. The cleaning material may include a cleaning pad layer with one or more intermediate layers that have predetermined characteristics, regular geometrical features, and/or an irregular surface morphology.