Invention Grant
- Patent Title: Eutectic bonding with AlGe
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Application No.: US15677994Application Date: 2017-08-15
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Publication No.: US10793427B2Publication Date: 2020-10-06
- Inventor: Martin Heller , Toma Fujita
- Applicant: Kionix, Inc.
- Applicant Address: US NY Ithaca
- Assignee: KIONIX, INC.
- Current Assignee: KIONIX, INC.
- Current Assignee Address: US NY Ithaca
- Agency: Alston & Bird LLP
- Main IPC: B81C1/00
- IPC: B81C1/00 ; B32B15/04 ; B32B15/20 ; H01L23/02 ; B81B7/00 ; H01L23/00

Abstract:
A MEMS device formed in a first semiconductor substrate is sealed using a second semiconductor substrate. To achieve this, an Aluminum Germanium structure is formed above the first substrate, and a polysilicon layer is formed above the second substrate. The first substrate is covered with the second substrate so as to cause the polysilicon layer to contact the Aluminum Germanium structure. Thereafter, eutectic bonding is performed between the first and second substrates so as to cause the Aluminum Germanium structure to melt and form an AlGeSi sealant thereby to seal the MEMS device. Optionally, the Germanium Aluminum structure includes, in part, a layer of Germanium overlaying a layer of Aluminum.
Public/Granted literature
- US20180282153A1 Eutectic Bonding With ALGe Public/Granted day:2018-10-04
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