Invention Grant
- Patent Title: Optical interference measuring device
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Application No.: US16293027Application Date: 2019-03-05
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Publication No.: US10794688B2Publication Date: 2020-10-06
- Inventor: Ken Motohashi , Johannes Anna Quaedackers , Adriaan Tiemen Zuiderweg
- Applicant: MITUTOYO CORPORATION
- Applicant Address: JP Kanagawa
- Assignee: MITUTOYO CORPORATION
- Current Assignee: MITUTOYO CORPORATION
- Current Assignee Address: JP Kanagawa
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@5f5e2ecf
- Main IPC: G01B9/02
- IPC: G01B9/02 ; G01B11/24

Abstract:
An interferometric optical device that measures the curved wall shape of a cylindrical object and includes: an interferometric optical system that emits measurement light at the curved wall of the object, collects the light reflected by the object, and creates a composite wave that combines the reflected light and a reference light; a rotation drive assembly that is connected to the interferometric optical system and rotationally displaces the interferometric optical system centered about a rotation axis that coincides with a center axis of the cylindrical shape of the object; a sensor that acquires a two-dimensional distribution of the intensity of the composite wave using a plurality of photoreceptor elements arrayed two-dimensionally; and a computation device that computes the internal wall shape of the object based on the plurality of two-dimensional distributions acquired in a state where a rotation angle for the rotation drive mechanism varies.
Public/Granted literature
- US20190277628A1 OPTICAL INTERFERENCE MEASURING DEVICE Public/Granted day:2019-09-12
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