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公开(公告)号:US09881400B2
公开(公告)日:2018-01-30
申请号:US14808230
申请日:2015-07-24
Applicant: MITUTOYO CORPORATION
Inventor: Adriaan Tiemen Zuiderweg , Johannes Anna Quaedackers , Harm Visscher
IPC: G06T11/20 , G01B11/24 , G01B11/245
CPC classification number: G06T11/206 , G01B11/2441 , G01B11/245 , G01B2210/52
Abstract: Method for measuring a height map of a test, including measuring a coarse height map of the test surface with a pre-map sensor provided to an optical profiler with a relatively long working distance and/or a large field of view, storing the coarse height map in a memory, subdividing the coarse height map into sections appropriate for the field of view of a high resolution optical profiler sensor provided to the optical profiler, calculating corresponding X, Y and Z positions for the optical profiler sensor with respect to the test surface, calculating a trajectory in the X, Y, Z-direction for the optical profiler sensor with respect to the test surface using the calculated X, Y, Z-positions, moving the optical profiler in the X, Y, Z-direction with respect to the test surface according to the trajectory, and measuring a high accuracy height map with the high resolution optical profiler sensor.
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公开(公告)号:US10563974B2
公开(公告)日:2020-02-18
申请号:US15198261
申请日:2016-06-30
Applicant: MITUTOYO CORPORATION
Inventor: Johannes Anna Quaedackers , Adriaan Tiemen Zuiderweg
IPC: G01B11/06
Abstract: A method for measuring a height map of multiple fields of view on a surface of a substrate with an optical profilometer and combining them to a composite height map, the method includes: moving the profilometer relative to the surface from field to field along a route; measuring height maps of fields on the surface along the route with the profilometer; and, combining a plurality of height maps of measured fields by normalizing said height maps to each other to produce a composite height map of the surface; wherein the route is configured to minimize sensitivity to height drifting of the profilometer during combining a plurality of the height maps.
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公开(公告)号:US11493330B2
公开(公告)日:2022-11-08
申请号:US17119246
申请日:2020-12-11
Applicant: MITUTOYO CORPORATION
Inventor: Hendrik Ketelaars , Adriaan Tiemen Zuiderweg , Lukasz Redlarski , John Quaedackers
IPC: G01B11/25 , G01B11/22 , G01N21/55 , G01N21/956 , G01B11/06
Abstract: A method for measuring a height map of a test surface having a varying reflectivity using a multi-sensor apparatus including a pre-scan sensor and a height measuring sensor is disclosed. The multi-sensor apparatus further comprises one or more light sources configured to illuminate the test surface and a spatial light modulator. The spatial light modulator is placed in a light path between the one or more light sources and a measuring location of the multi-sensor apparatus and is configured to modulate light emitted from at least one of the light sources. The method comprises performing a measurement for determining an illumination intensity map of the test surface and a measurement for performing a height map of the test surface.
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公开(公告)号:US10794688B2
公开(公告)日:2020-10-06
申请号:US16293027
申请日:2019-03-05
Applicant: MITUTOYO CORPORATION
Inventor: Ken Motohashi , Johannes Anna Quaedackers , Adriaan Tiemen Zuiderweg
Abstract: An interferometric optical device that measures the curved wall shape of a cylindrical object and includes: an interferometric optical system that emits measurement light at the curved wall of the object, collects the light reflected by the object, and creates a composite wave that combines the reflected light and a reference light; a rotation drive assembly that is connected to the interferometric optical system and rotationally displaces the interferometric optical system centered about a rotation axis that coincides with a center axis of the cylindrical shape of the object; a sensor that acquires a two-dimensional distribution of the intensity of the composite wave using a plurality of photoreceptor elements arrayed two-dimensionally; and a computation device that computes the internal wall shape of the object based on the plurality of two-dimensional distributions acquired in a state where a rotation angle for the rotation drive mechanism varies.
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