公开(公告)号：US09881400B2

公开(公告)日：2018-01-30

申请号：US14808230

申请日：2015-07-24

Applicant: MITUTOYO CORPORATION

Inventor： Adriaan Tiemen Zuiderweg ,  Johannes Anna Quaedackers ,  Harm Visscher

IPC: G06T11/20 ,  G01B11/24 ,  G01B11/245

CPC classification number: G06T11/206 ,  G01B11/2441 ,  G01B11/245 ,  G01B2210/52

Abstract: Method for measuring a height map of a test, including measuring a coarse height map of the test surface with a pre-map sensor provided to an optical profiler with a relatively long working distance and/or a large field of view, storing the coarse height map in a memory, subdividing the coarse height map into sections appropriate for the field of view of a high resolution optical profiler sensor provided to the optical profiler, calculating corresponding X, Y and Z positions for the optical profiler sensor with respect to the test surface, calculating a trajectory in the X, Y, Z-direction for the optical profiler sensor with respect to the test surface using the calculated X, Y, Z-positions, moving the optical profiler in the X, Y, Z-direction with respect to the test surface according to the trajectory, and measuring a high accuracy height map with the high resolution optical profiler sensor.

公开(公告)号：US10563974B2

公开(公告)日：2020-02-18

申请号：US15198261

申请日：2016-06-30

Applicant: MITUTOYO CORPORATION

Inventor： Johannes Anna Quaedackers ,  Adriaan Tiemen Zuiderweg

IPC: G01B11/06

Abstract: A method for measuring a height map of multiple fields of view on a surface of a substrate with an optical profilometer and combining them to a composite height map, the method includes: moving the profilometer relative to the surface from field to field along a route; measuring height maps of fields on the surface along the route with the profilometer; and, combining a plurality of height maps of measured fields by normalizing said height maps to each other to produce a composite height map of the surface; wherein the route is configured to minimize sensitivity to height drifting of the profilometer during combining a plurality of the height maps.

公开(公告)号：US11493330B2

公开(公告)日：2022-11-08

申请号：US17119246

申请日：2020-12-11

Applicant: MITUTOYO CORPORATION

Inventor： Hendrik Ketelaars ,  Adriaan Tiemen Zuiderweg ,  Lukasz Redlarski ,  John Quaedackers

IPC: G01B11/25 ,  G01B11/22 ,  G01N21/55 ,  G01N21/956 ,  G01B11/06

Abstract: A method for measuring a height map of a test surface having a varying reflectivity using a multi-sensor apparatus including a pre-scan sensor and a height measuring sensor is disclosed. The multi-sensor apparatus further comprises one or more light sources configured to illuminate the test surface and a spatial light modulator. The spatial light modulator is placed in a light path between the one or more light sources and a measuring location of the multi-sensor apparatus and is configured to modulate light emitted from at least one of the light sources. The method comprises performing a measurement for determining an illumination intensity map of the test surface and a measurement for performing a height map of the test surface.

公开(公告)号：US10794688B2

公开(公告)日：2020-10-06

申请号：US16293027

申请日：2019-03-05

Applicant: MITUTOYO CORPORATION

Inventor： Ken Motohashi ,  Johannes Anna Quaedackers ,  Adriaan Tiemen Zuiderweg

IPC: G01B9/02 ,  G01B11/24

Abstract: An interferometric optical device that measures the curved wall shape of a cylindrical object and includes: an interferometric optical system that emits measurement light at the curved wall of the object, collects the light reflected by the object, and creates a composite wave that combines the reflected light and a reference light; a rotation drive assembly that is connected to the interferometric optical system and rotationally displaces the interferometric optical system centered about a rotation axis that coincides with a center axis of the cylindrical shape of the object; a sensor that acquires a two-dimensional distribution of the intensity of the composite wave using a plurality of photoreceptor elements arrayed two-dimensionally; and a computation device that computes the internal wall shape of the object based on the plurality of two-dimensional distributions acquired in a state where a rotation angle for the rotation drive mechanism varies.