Invention Grant
- Patent Title: Model for estimating stochastic variation
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Application No.: US16462569Application Date: 2017-11-17
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Publication No.: US10795267B2Publication Date: 2020-10-06
- Inventor: Steven George Hansen
- Applicant: ASML NETHERLANDS B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- International Application: PCT/EP2017/079683 WO 20171117
- International Announcement: WO2018/099742 WO 20180607
- Main IPC: G03B27/54
- IPC: G03B27/54 ; G03F7/20 ; G06F7/70

Abstract:
A method including: obtaining a resist process dose sensitivity value for a patterning process; applying the resist process dose sensitivity value to a stochastic model providing values of a stochastic variable as a function of resist process dose sensitivity to obtain a value of the stochastic variable; and designing or modifying a parameter of the patterning process based on the stochastic variable value.
Public/Granted literature
- US20190317410A1 MODEL FOR ESTIMATING STOCHASTIC VARIATION Public/Granted day:2019-10-17
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