Invention Grant
- Patent Title: Apparatuses and methods for high sensitivity TSV resistance measurement circuit
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Application No.: US16121377Application Date: 2018-09-04
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Publication No.: US10797033B2Publication Date: 2020-10-06
- Inventor: Akira Ide
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: Dorsey & Whitney LLP
- Main IPC: G11C5/02
- IPC: G11C5/02 ; H01L25/18 ; H01L23/48 ; H01L23/528 ; H03F3/45 ; G01R31/28 ; H03F3/387

Abstract:
Embodiments of the disclosure are drawn to apparatuses and methods for testing the resistance of through silicon vias (TSVs) which may be used, for example, to couple multiple memory dies of a semiconductor memory device. A force amplifier may selectively provide a known current along a mesh wiring structure and through the TSV to be tested. The force amplifier may be positioned on a vacant area of the memory device, while the mesh wiring structure may be positioned in an area beneath the TSVs of the layers of the device. A chopper instrumentation amplifier may be selectively coupled to the TSV to be tested to amplify a voltage across the TSV generated by the current passing through the TSV. The chopper instrumentation amplifier may be capable of determining small resistance values of the TSV.
Public/Granted literature
- US20200075568A1 APPARATUSES AND METHODS FOR HIGH SENSITIVITY TSV RESISTANCE MEASUREMENT CIRCUIT Public/Granted day:2020-03-05
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