Invention Grant
- Patent Title: Laser apparatus
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Application No.: US16266357Application Date: 2019-02-04
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Publication No.: US10797465B2Publication Date: 2020-10-06
- Inventor: Hirotaka Miyamoto , Osamu Wakabayashi
- Applicant: Gigaphoton Inc.
- Applicant Address: JP Tochigi
- Assignee: Gigaphoton Inc.
- Current Assignee: Gigaphoton Inc.
- Current Assignee Address: JP Tochigi
- Agency: Studebaker & Brackett PC
- Main IPC: H01S3/137
- IPC: H01S3/137 ; H01S3/08 ; G01J3/02 ; H01S3/225 ; H01S3/081

Abstract:
A laser apparatus includes first and second wavelength dispersion elements, an optical element, first and second actuators, and a control unit. The first wavelength dispersion element generates wavelength dispersion in a direction orthogonal to an electric discharge direction between a pair of electric discharge electrodes. The second wavelength dispersion element generates wavelength dispersion in a direction parallel to the electric discharge direction. The optical element corrects wavelength dispersion generated by the second wavelength dispersion element. The first actuator drives the first wavelength dispersion element. The second actuator drives the optical element. The control unit controls the first actuator so that the center wavelength of the laser light approaches to a target wavelength and controls the second actuator so as to correct the wavelength dispersion generated by the second wavelength dispersion element.
Public/Granted literature
- US20190181607A1 LASER APPARATUS Public/Granted day:2019-06-13
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