Invention Grant
- Patent Title: MEMS actuation systems and methods
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Application No.: US15698942Application Date: 2017-09-08
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Publication No.: US10807857B2Publication Date: 2020-10-20
- Inventor: Xiaolei Liu , Matthew Ng , Guiqin Wang , Gerardo Morabito
- Applicant: MEMS Drive, Inc.
- Applicant Address: US CA Pasadena
- Assignee: MEMS Drive, Inc.
- Current Assignee: MEMS Drive, Inc.
- Current Assignee Address: US CA Pasadena
- Agency: Holland & Knight LLP
- Agent Brian J. Colandreo; Michael T. Abramson
- Main IPC: B81B7/00
- IPC: B81B7/00 ; B81B3/00
Abstract:
A micro-electrical-mechanical system (MEMS) cantilever assembly includes an intermediary cantilever portion, a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion, and a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS).
Public/Granted literature
- US20180072561A1 MEMS ACTUATION SYSTEMS AND METHODS Public/Granted day:2018-03-15
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