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公开(公告)号：US20190152765A1
公开(公告)日：2019-05-23
申请号：US16251933
申请日：2019-01-18
Applicant: MEMS Drive, Inc.
Inventor： Gerardo Morabito , Xiaolei Liu , Guiqin Wang , Roman Gutierrez , Matthew Ng
Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.
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公开(公告)号：US20190308871A1
公开(公告)日：2019-10-10
申请号：US16385486
申请日：2019-04-16
Applicant: MEMS Drive, Inc.
Inventor： Xiaolei Liu , Matthew Ng , Robert Calvet , Gerardo Morabito
Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.
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公开(公告)号：US10322925B2
公开(公告)日：2019-06-18
申请号：US15165893
申请日：2016-05-26
Applicant: MEMS DRIVE, INC.
Inventor： Xiaolei Liu , Matthew Ng , Robert Calvet , Gerardo Morabito
Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.
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公开(公告)号：US10259702B2
公开(公告)日：2019-04-16
申请号：US15412488
申请日：2017-01-23
Applicant: MEMS Drive, Inc.
Inventor： Xiaolei Liu , Matthew Ng , Robert Calvet , Gerardo Morabito
Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.
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公开(公告)号：US20180072561A1
公开(公告)日：2018-03-15
申请号：US15698942
申请日：2017-09-08
Applicant: MEMS Drive, Inc.
Inventor： Xiaolei Liu , Matthew Ng , Guiqin Wang , Gerardo Morabito
Abstract: A micro-electrical-mechanical system (MEMS) cantilever assembly includes an intermediary cantilever portion, a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion, and a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS).
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Patent Agency Ranking
公开(公告)号：US20170341928A1
公开(公告)日：2017-11-30
申请号：US15412488
申请日：2017-01-23
Applicant: MEMS Drive, Inc.
Inventor： Xiaolei Liu , Matthew Ng , Robert Calvet , Gerardo Morabito
CPC classification number: B81B3/0021 , B81B3/0051 , B81B7/0016 , B81B7/0058 , B81B2201/033 , B81B2203/0118 , B81B2203/0136 , H02N1/008
Abstract: Caging structures are disclosed for caging or otherwise reducing the mechanical shock pulse experienced by MEMS device beam structures during events that may cause mechanical shock to the MEMS device. The caging structures at least partially surround the beam such that they limit the motion of the beam in a direction perpendicular to the beam's longitudinal axis, thereby reducing stress on the beam during a mechanical shock event. The caging structures may be used in combination with mechanical shock-resistant beams.
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公开(公告)号：US11124411B2
公开(公告)日：2021-09-21
申请号：US16251838
申请日：2019-01-18
Applicant: MEMS Drive, Inc.
Inventor： Gerardo Morabito , Xiaolei Liu , Guiqin Wang , Roman Gutierrez , Matthew Ng
Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.
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公开(公告)号：US10815119B2
公开(公告)日：2020-10-27
申请号：US16251933
申请日：2019-01-18
Applicant: MEMS Drive, Inc.
Inventor： Gerardo Morabito , Xiaolei Liu , Guiqin Wang , Roman Gutierrez , Matthew Ng
Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.
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公开(公告)号：US10807857B2
公开(公告)日：2020-10-20
申请号：US15698942
申请日：2017-09-08
Applicant: MEMS Drive, Inc.
Inventor： Xiaolei Liu , Matthew Ng , Guiqin Wang , Gerardo Morabito
Abstract: A micro-electrical-mechanical system (MEMS) cantilever assembly includes an intermediary cantilever portion, a main cantilever arm configured to couple a moveable portion of a micro-electrical-mechanical system (MEMS) and the intermediary cantilever portion, and a plurality of intermediary links configured to couple the intermediary cantilever portion to a portion of the micro-electrical-mechanical system (MEMS).
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公开(公告)号：US20190152764A1
公开(公告)日：2019-05-23
申请号：US16251838
申请日：2019-01-18
Applicant: MEMS Drive, Inc.
Inventor： Gerardo Morabito , Xiaolei Liu , Guiqin Wang , Roman Gutierrez , Matthew Ng
Abstract: Shock-resistant MEMS structures are disclosed. In one implementation, a motion control flexure for a MEMS device includes: a rod including a first and second end, wherein the rod is tapered along its length such that it is widest at its center and thinnest at its ends; a first hinge directly coupled to the first end of the rod; and a second hinge directly coupled to the second of the rod. In another implementation, a conductive cantilever for a MEMS device includes: a curved center portion includes a first and second end, wherein the center portion has a point of inflection; a first root coupled to the first end of the center portion; and a second root coupled to the second end of the center portion. In yet another implementation, a shock stop for a MEMS device is described.
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