• 专利标题: X-ray source with ionisation tool
  • 申请号: US16309754
    申请日: 2017-06-18
  • 公开(公告)号: US10825642B2
    公开(公告)日: 2020-11-03
  • 发明人: Tomi Tuohimaa
  • 申请人: Excillum AB
  • 申请人地址: SE Kista
  • 专利权人: EXCILLUM AB
  • 当前专利权人: EXCILLUM AB
  • 当前专利权人地址: SE Kista
  • 代理机构: Buchanan Ingersoll & Rooney P.C.
  • 优先权: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@27daa47f
  • 国际申请: PCT/EP2017/064857 WO 20170618
  • 国际公布: WO2017/220455 WO 20171228
  • 主分类号: H01J35/20
  • IPC分类号: H01J35/20 H01J35/18
X-ray source with ionisation tool
摘要:
An X-ray source and a corresponding method for generating X-ray radiation are disclosed. The X-ray source includes a chamber comprising an interaction region, and a first electron source operable to emit a first electron beam, including electrons of a first energy, towards the interaction region such that the first electron beam interacts with a target to generate X-ray radiation. The X-ray source further includes a second electron source adapted to be independently operated to emit a second electron beam including electrons of a second energy for ionising particles in the chamber, and an ion collection tool that is adapted to remove the ionised particles from the chamber by means of an electromagnetic field. By ionising particles and preventing them from moving freely in the chamber, problems related to contamination of the chamber may be mitigated.
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