Invention Grant
- Patent Title: X-ray source with ionisation tool
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Application No.: US16309754Application Date: 2017-06-18
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Publication No.: US10825642B2Publication Date: 2020-11-03
- Inventor: Tomi Tuohimaa
- Applicant: Excillum AB
- Applicant Address: SE Kista
- Assignee: EXCILLUM AB
- Current Assignee: EXCILLUM AB
- Current Assignee Address: SE Kista
- Agency: Buchanan Ingersoll & Rooney P.C.
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@27daa47f
- International Application: PCT/EP2017/064857 WO 20170618
- International Announcement: WO2017/220455 WO 20171228
- Main IPC: H01J35/20
- IPC: H01J35/20 ; H01J35/18

Abstract:
An X-ray source and a corresponding method for generating X-ray radiation are disclosed. The X-ray source includes a chamber comprising an interaction region, and a first electron source operable to emit a first electron beam, including electrons of a first energy, towards the interaction region such that the first electron beam interacts with a target to generate X-ray radiation. The X-ray source further includes a second electron source adapted to be independently operated to emit a second electron beam including electrons of a second energy for ionising particles in the chamber, and an ion collection tool that is adapted to remove the ionised particles from the chamber by means of an electromagnetic field. By ionising particles and preventing them from moving freely in the chamber, problems related to contamination of the chamber may be mitigated.
Public/Granted literature
- US20190131103A1 X-RAY SOURCE WITH IONISATION TOOL Public/Granted day:2019-05-02
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