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公开(公告)号：US11892576B2
公开(公告)日：2024-02-06
申请号：US18155314
申请日：2023-01-17
Applicant: Excillum AB
Inventor： Per Takman , Tomi Tuohimaa , Ulf Lundström
CPC classification number: G01T1/34 , H01J35/153 , H05G1/52 , H01J2235/082
Abstract: A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also, a corresponding liquid metal jet X-ray source.
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公开(公告)号：US10825642B2
公开(公告)日：2020-11-03
申请号：US16309754
申请日：2017-06-18
Applicant: Excillum AB
Inventor： Tomi Tuohimaa
Abstract: An X-ray source and a corresponding method for generating X-ray radiation are disclosed. The X-ray source includes a chamber comprising an interaction region, and a first electron source operable to emit a first electron beam, including electrons of a first energy, towards the interaction region such that the first electron beam interacts with a target to generate X-ray radiation. The X-ray source further includes a second electron source adapted to be independently operated to emit a second electron beam including electrons of a second energy for ionising particles in the chamber, and an ion collection tool that is adapted to remove the ionised particles from the chamber by means of an electromagnetic field. By ionising particles and preventing them from moving freely in the chamber, problems related to contamination of the chamber may be mitigated.
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公开(公告)号：US10818468B1
公开(公告)日：2020-10-27
申请号：US16081585
申请日：2017-03-01
Applicant: Excillum AB
Inventor： Björn Hansson , Tomi Tuohimaa , Göran Johansson
Abstract: An X-ray source and a corresponding method for generating X-ray radiation are disclosed. The X-ray source includes a target generator, an electron source and a mixing tool. The target generator is adapted to form a liquid jet propagating through an interaction region, whereas the electron source is adapted to provide an electron beam directed towards the interaction region such that the electron beam interacts with the liquid jet to generate X-ray radiation. The mixing tool is adapted to induce mixing of the liquid jet at a distance downstream of the interaction region such that a maximum surface temperature of the liquid jet is below a threshold temperature. By controlling the maximum surface temperature, vaporisation, and thus the amount of contaminations originating from the jet, may be reduced.
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公开(公告)号：US11979972B2
公开(公告)日：2024-05-07
申请号：US17609655
申请日：2020-05-07
Applicant: Excillum AB
Inventor： Björn Hansson , Per Takman , Ulf Lundström , Tomi Tuohimaa
CPC classification number: H05G2/006 , F04B15/02 , F04B17/03 , F04B17/04 , H01J35/112 , H01J2235/082 , H01J2235/1026
Abstract: A liquid metal jet X-ray source including an electromagnetic pump for pumping the liquid metal. The electromagnetic pump includes a core having a core diameter and an outer yoke with a thickness of at least 20% of the core diameter. Preferably, the thickness of the outer yoke is at least 20% of the core diameter plus 6% of a radial distance between an outside of the core and an inside of the yoke.
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公开(公告)号：US10930464B2
公开(公告)日：2021-02-23
申请号：US16499582
申请日：2018-03-27
Applicant: Excillum AB
Inventor： Per Takman , Tomi Tuohimaa
Abstract: A method for generating X-ray radiation, the method including providing a liquid target in a chamber, directing an electron beam towards the liquid target such that the electron beam interacts with the liquid target to generated X-ray radiation, estimating a number of particles produced from the interaction between the electron beam and the liquid target by measuring a number of positively charged particles in the chamber and eliminating a contribution from scattered electrons to the estimated number of particles, and controlling the electron beam, and/or a temperature in a region of the liquid target in which the electron beam interacts with the target, such that the estimated number of particles is below a predetermined limit. Also, a corresponding X-ray source.
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Patent Agency Ranking
公开(公告)号：US20250046560A1
公开(公告)日：2025-02-06
申请号：US18717615
申请日：2022-12-06
Applicant: Excillum AB
Inventor： Per Takman , Tomi Tuohimaa , Ulf Lundström
Abstract: There is provided an X-ray source comprising an electron source for providing an electron beam, the electron source comprising a cathode, a Wehnelt, and an anode; an electron optic arrangement configured to deflect and focus the electron beam towards a target for generation of X-ray radiation; an arrangement for determining a quantity indicative of a width of the electron beam; and a controller configured to compute a quantity dependent on a divergence of the electron beam at an entrance of the electron optic arrangement based on the quantity indicative of a width of the electron beam; and apply a bias voltage to the Wehnelt such that the quantity dependent on the divergence of the electron beam at the entrance of the electron optic arrangement is adjusted towards a desired value. A corresponding method is also provided.
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公开(公告)号：US11910515B2
公开(公告)日：2024-02-20
申请号：US17595064
申请日：2020-05-07
Applicant: Excillum AB
Inventor： Ulf Lundström , Björn Hansson , Per Takman , Tomi Tuohimaa
CPC classification number: H05G2/006 , F04B15/02 , F04B17/03 , F04B17/04 , H01J35/112 , H01J2235/082 , H01J2235/1026
Abstract: An electromagnetic pump for pumping an electrically conductive liquid, including a first conduit section and a second conduit section. The electromagnetic pump further includes a current generator arranged to provide an electric current through the liquid in the first conduit section and the liquid in the second conduit section such that a direction of the electric current is intersecting the flow of the liquid in the first conduit section and in the second conduit section, and a magnetic field generating arrangement arranged to provide a magnetic field passing through the liquid in the first conduit section and the second conduit section such that a direction of the magnetic field is intersecting the flow of the liquid and the direction of the electric current.
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公开(公告)号：US11579318B2
公开(公告)日：2023-02-14
申请号：US17777747
申请日：2020-11-12
Applicant: Excillum AB
Inventor： Per Takman , Tomi Tuohimaa , Ulf Lundström
IPC: G01T1/34
Abstract: A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also a corresponding liquid metal jet X-ray source.
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公开(公告)号：US11438996B2
公开(公告)日：2022-09-06
申请号：US16967151
申请日：2019-02-08
Applicant: Excillum AB
Inventor： Tomi Tuohimaa , Per Takman , Daniel Larsson
Abstract: A method for protecting an X-ray source including: a liquid jet generator configured to form a liquid jet moving along a flow axis; an electron source configured to provide an electron beam interacting with the liquid jet to generate X-ray radiation; the method including: generating the liquid jet: monitoring a quality measure indicating a performance of the liquid jet; identifying, based on the quality measure, a malperformance of the liquid jet; and if said malperformance is identified, causing the X-ray source to enter a safe mode for protecting the X ray source. Further, to corresponding devices.
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公开(公告)号：US10784069B2
公开(公告)日：2020-09-22
申请号：US16340449
申请日：2017-10-19
Applicant: Excillum AB
Inventor： Tomi Tuohimaa , Per Takman , Andrii Sofiienko
Abstract: A system and method for generating X-ray radiation. The system includes an electron source operable to generate an electron beam and an X-ray target for generating X-ray radiation upon interaction with the electron beam. The method includes moving the electron beam over an edge separating a first region and a second region of the X-ray target, wherein the first region and the second region have different capability to generate X-ray radiation upon interaction with the electron beam. The system allows for a lateral extension of the electron beam to be determined based on a change in a quantity indicative of the interaction between the electron beam and the first region and between the electron beam and the second region, and the movement of the electron beam.
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