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公开(公告)号：US11892576B2
公开(公告)日：2024-02-06
申请号：US18155314
申请日：2023-01-17
申请人： Excillum AB
发明人： Per Takman , Tomi Tuohimaa , Ulf Lundström
CPC分类号： G01T1/34 , H01J35/153 , H05G1/52 , H01J2235/082
摘要： A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also, a corresponding liquid metal jet X-ray source.
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公开(公告)号：US10825642B2
公开(公告)日：2020-11-03
申请号：US16309754
申请日：2017-06-18
申请人： Excillum AB
发明人： Tomi Tuohimaa
摘要： An X-ray source and a corresponding method for generating X-ray radiation are disclosed. The X-ray source includes a chamber comprising an interaction region, and a first electron source operable to emit a first electron beam, including electrons of a first energy, towards the interaction region such that the first electron beam interacts with a target to generate X-ray radiation. The X-ray source further includes a second electron source adapted to be independently operated to emit a second electron beam including electrons of a second energy for ionising particles in the chamber, and an ion collection tool that is adapted to remove the ionised particles from the chamber by means of an electromagnetic field. By ionising particles and preventing them from moving freely in the chamber, problems related to contamination of the chamber may be mitigated.
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公开(公告)号：US10818468B1
公开(公告)日：2020-10-27
申请号：US16081585
申请日：2017-03-01
申请人： Excillum AB
发明人： Björn Hansson , Tomi Tuohimaa , Göran Johansson
摘要： An X-ray source and a corresponding method for generating X-ray radiation are disclosed. The X-ray source includes a target generator, an electron source and a mixing tool. The target generator is adapted to form a liquid jet propagating through an interaction region, whereas the electron source is adapted to provide an electron beam directed towards the interaction region such that the electron beam interacts with the liquid jet to generate X-ray radiation. The mixing tool is adapted to induce mixing of the liquid jet at a distance downstream of the interaction region such that a maximum surface temperature of the liquid jet is below a threshold temperature. By controlling the maximum surface temperature, vaporisation, and thus the amount of contaminations originating from the jet, may be reduced.
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公开(公告)号：US11910515B2
公开(公告)日：2024-02-20
申请号：US17595064
申请日：2020-05-07
申请人： Excillum AB
发明人： Ulf Lundström , Björn Hansson , Per Takman , Tomi Tuohimaa
CPC分类号： H05G2/006 , F04B15/02 , F04B17/03 , F04B17/04 , H01J35/112 , H01J2235/082 , H01J2235/1026
摘要： An electromagnetic pump for pumping an electrically conductive liquid, including a first conduit section and a second conduit section. The electromagnetic pump further includes a current generator arranged to provide an electric current through the liquid in the first conduit section and the liquid in the second conduit section such that a direction of the electric current is intersecting the flow of the liquid in the first conduit section and in the second conduit section, and a magnetic field generating arrangement arranged to provide a magnetic field passing through the liquid in the first conduit section and the second conduit section such that a direction of the magnetic field is intersecting the flow of the liquid and the direction of the electric current.
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公开(公告)号：US11579318B2
公开(公告)日：2023-02-14
申请号：US17777747
申请日：2020-11-12
申请人： Excillum AB
发明人： Per Takman , Tomi Tuohimaa , Ulf Lundström
IPC分类号： G01T1/34
摘要： A method for characterizing an electron beam in a liquid metal jet X-ray source. The method includes providing the electron beam and directing the electron beam to an interaction region; providing an electron beam dump connected to ground potential for receiving the electron beam after it has traversed the interaction region; scanning the electron beam over at least part of the interaction region; measuring X-ray radiation generated by interaction between the electron beam and the electron beam dump during the scanning to obtain an X-ray profile; and calculating an electron beam characteristic based on the X-ray profile. Also a corresponding liquid metal jet X-ray source.
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公开(公告)号：US11438996B2
公开(公告)日：2022-09-06
申请号：US16967151
申请日：2019-02-08
申请人： Excillum AB
发明人： Tomi Tuohimaa , Per Takman , Daniel Larsson
摘要： A method for protecting an X-ray source including: a liquid jet generator configured to form a liquid jet moving along a flow axis; an electron source configured to provide an electron beam interacting with the liquid jet to generate X-ray radiation; the method including: generating the liquid jet: monitoring a quality measure indicating a performance of the liquid jet; identifying, based on the quality measure, a malperformance of the liquid jet; and if said malperformance is identified, causing the X-ray source to enter a safe mode for protecting the X ray source. Further, to corresponding devices.
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公开(公告)号：US10784069B2
公开(公告)日：2020-09-22
申请号：US16340449
申请日：2017-10-19
申请人： Excillum AB
发明人： Tomi Tuohimaa , Per Takman , Andrii Sofiienko
摘要： A system and method for generating X-ray radiation. The system includes an electron source operable to generate an electron beam and an X-ray target for generating X-ray radiation upon interaction with the electron beam. The method includes moving the electron beam over an edge separating a first region and a second region of the X-ray target, wherein the first region and the second region have different capability to generate X-ray radiation upon interaction with the electron beam. The system allows for a lateral extension of the electron beam to be determined based on a change in a quantity indicative of the interaction between the electron beam and the first region and between the electron beam and the second region, and the movement of the electron beam.
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公开(公告)号：US09530607B2
公开(公告)日：2016-12-27
申请号：US14457385
申请日：2014-08-12
申请人： EXCILLUM AB
发明人： Oscar Hemberg , Tomi Tuohimaa , Mikael Otendal
CPC分类号： H01J35/08 , G03F7/70033 , H01J35/12 , H01J2235/082 , H01J2235/1204 , H01J2235/1279 , H05G2/003 , H05G2/008
摘要： Closed-loop circulation for providing liquid metal to an interaction region at which an electron beam is to impact upon the liquid metal to produce X-rays is presented. In a method, the pressure of the liquid metal is raised to at least 10 bar using a high-pressure pump. The pressurized liquid metal is then conducted to a nozzle and ejected into a vacuum chamber in the form of a spatially continuous jet. After passage through the vacuum chamber, the liquid metal is collected in a collection reservoir, and the pressure of the liquid metal is raised to an inlet pressure, e.g. using a primer pump, suitable for the inlet of the high-pressure pump. Also, a corresponding circulation system and an X-ray source provided with such circulation system.
摘要翻译： 提出了用于将液体金属提供到电子束将冲击液态金属以产生X射线的相互作用区域的闭环循环。 在一种方法中，使用高压泵将液态金属的压力提高至至少10巴。 然后将加压液体金属传导到喷嘴并以空间连续射流的形式喷射到真空室中。 在通过真空室之后，将液态金属收集在收集容器中，并且将液态金属的压力升高到入口压力，例如， 使用底漆泵，适用于高压泵的入口。 另外，具有这样的循环系统的相应的循环系统和X射线源。
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公开(公告)号：US11979972B2
公开(公告)日：2024-05-07
申请号：US17609655
申请日：2020-05-07
申请人： Excillum AB
发明人： Björn Hansson , Per Takman , Ulf Lundström , Tomi Tuohimaa
CPC分类号： H05G2/006 , F04B15/02 , F04B17/03 , F04B17/04 , H01J35/112 , H01J2235/082 , H01J2235/1026
摘要： A liquid metal jet X-ray source including an electromagnetic pump for pumping the liquid metal. The electromagnetic pump includes a core having a core diameter and an outer yoke with a thickness of at least 20% of the core diameter. Preferably, the thickness of the outer yoke is at least 20% of the core diameter plus 6% of a radial distance between an outside of the core and an inside of the yoke.
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公开(公告)号：US10930464B2
公开(公告)日：2021-02-23
申请号：US16499582
申请日：2018-03-27
申请人： Excillum AB
发明人： Per Takman , Tomi Tuohimaa
摘要： A method for generating X-ray radiation, the method including providing a liquid target in a chamber, directing an electron beam towards the liquid target such that the electron beam interacts with the liquid target to generated X-ray radiation, estimating a number of particles produced from the interaction between the electron beam and the liquid target by measuring a number of positively charged particles in the chamber and eliminating a contribution from scattered electrons to the estimated number of particles, and controlling the electron beam, and/or a temperature in a region of the liquid target in which the electron beam interacts with the target, such that the estimated number of particles is below a predetermined limit. Also, a corresponding X-ray source.
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