Invention Grant
- Patent Title: Piezoelectric element, ultrasonic probe, ultrasonic measurement device, and manufacturing method of piezoelectric element
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Application No.: US15340920Application Date: 2016-11-01
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Publication No.: US10828013B2Publication Date: 2020-11-10
- Inventor: Sayaka Yamasaki , Hiroaki Tamura
- Applicant: SEIKO EPSON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: SEIKO EPSON CORPORATION
- Current Assignee: SEIKO EPSON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Chip Law Group
- Priority: com.zzzhc.datahub.patent.etl.us.BibliographicData$PriorityClaim@75b85372
- Main IPC: H01L41/08
- IPC: H01L41/08 ; A61B8/00 ; H01L41/113 ; G01P15/09 ; H02N2/18 ; B06B1/06 ; H01L41/04 ; H01L41/083 ; H01L41/187 ; H01L41/257 ; H01L41/29 ; H01L41/312

Abstract:
A piezoelectric element includes: a piezoelectric body; and a vibrating plate including single crystal silicon having anisotropy having orientation with a relatively high Poisson's ratio and orientation with a relatively low Poisson's ratio (hereinafter, referred to as “low Poisson's ratio orientation”) as a vibrating material, in which the piezoelectric body and the vibrating plate are laminated on each other so that the low Poisson's ratio orientation is in a direction along a high expansion and contraction direction among a direction where a degree of expansion and contraction caused according to a support structure of the piezoelectric body is relatively high (hereinafter, referred to as “high expansion and contraction direction”) and a direction where a degree thereof is relatively low.
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