Invention Grant
- Patent Title: Methods and apparatus for shutter disk assembly detection
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Application No.: US15950726Application Date: 2018-04-11
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Publication No.: US10851453B2Publication Date: 2020-12-01
- Inventor: Cheng-Hsiung Tsai , Ananthkrishna Jupudi , Eiji Asahina , Sarath Babu
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Main IPC: C23C14/52
- IPC: C23C14/52 ; C23C14/02 ; C23C14/54 ; C23C14/56 ; H01J37/34

Abstract:
Methods and apparatus for detecting a shutter disk assembly in a process chamber using a number of sensors. A first, second, and third sensor in a shutter housing for a shutter disk assembly provide indications of a status of the shutter disk assembly. The indications are used in part to determine the operational status of the shutter disk assembly along with process information from a process controller. The operational status is then used to alter a process of the process chamber when necessary.
Public/Granted literature
- US20190316251A1 METHODS AND APPARATUS FOR SHUTTER DISK ASSEMBLY DETECTION Public/Granted day:2019-10-17
Information query
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