公开(公告)号：US10851453B2

公开(公告)日：2020-12-01

申请号：US15950726

申请日：2018-04-11

Applicant: APPLIED MATERIALS, INC.

Inventor： Cheng-Hsiung Tsai ,  Ananthkrishna Jupudi ,  Eiji Asahina ,  Sarath Babu

IPC: C23C14/52 ,  C23C14/02 ,  C23C14/54 ,  C23C14/56 ,  H01J37/34

Abstract: Methods and apparatus for detecting a shutter disk assembly in a process chamber using a number of sensors. A first, second, and third sensor in a shutter housing for a shutter disk assembly provide indications of a status of the shutter disk assembly. The indications are used in part to determine the operational status of the shutter disk assembly along with process information from a process controller. The operational status is then used to alter a process of the process chamber when necessary.