Invention Grant
- Patent Title: Pattern forming method, resist pattern, method for manufacturing electronic device, and composition for forming upper layer film
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Application No.: US15823593Application Date: 2017-11-28
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Publication No.: US10852637B2Publication Date: 2020-12-01
- Inventor: Naoki Inoue , Naohiro Tango , Kei Yamamoto , Michihiro Shirakawa , Akiyoshi Goto
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: JCIPRNET
- Priority: JP2015-110362 20150529
- Main IPC: G03F7/32
- IPC: G03F7/32 ; G03F7/11 ; G03F7/09

Abstract:
Provided are a pattern forming method including a step of applying a composition for forming an upper layer film, containing a resin having a C log P(Poly) of 3.0 or more and at least one compound selected from the group consisting of (A1) to (A4) described in the specification onto a resist film to form an upper layer film, a step of exposing the resist film, and a step of developing the exposed resist film with a developer including an organic solvent; a resist pattern formed by the pattern forming method; a method for manufacturing an electronic device, including the pattern forming method; and the composition for forming an upper layer film.
Public/Granted literature
Information query
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