Invention Grant
- Patent Title: Formation of correlated electron material (CEM) devices with restored sidewall regions
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Application No.: US16163190Application Date: 2018-10-17
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Publication No.: US10854811B2Publication Date: 2020-12-01
- Inventor: Paul Raymond Besser , Ming He , Jolanta Bozena Celinska
- Applicant: Arm Limited
- Applicant Address: GB Cambridge
- Assignee: Arm Limited
- Current Assignee: Arm Limited
- Current Assignee Address: GB Cambridge
- Agency: Berkley Law & Technology Group, LLP
- Main IPC: H01L45/00
- IPC: H01L45/00

Abstract:
Subject matter disclosed herein may relate to fabrication of a correlated electron material (CEM) switch. In particular embodiments, formation of a CEM switch may include removing of an exposed portion of a CEM film to form an exposed sidewall region bordering a remaining unexposed portion of the CEM film under or beneath a conductive overlay. The method may further include at least partially restoring properties of the exposed sidewall region to a CEM via exposure of the exposed sidewall region to one or more gaseous annealing agents.
Public/Granted literature
- US20200127196A1 FORMATION OF CORRELATED ELECTRON MATERIAL (CEM) DEVICES WITH RESTORED SIDEWALL REGIONS Public/Granted day:2020-04-23
Information query
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