Invention Grant
- Patent Title: Elastic wave device
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Application No.: US15591216Application Date: 2017-05-10
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Publication No.: US10862020B2Publication Date: 2020-12-08
- Inventor: Yutaka Kishimoto , Tetsuya Kimura
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Kyoto
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Kyoto
- Agency: Keating & Bennett, LLP
- Priority: JP2016-117181 20160613
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H01L41/107 ; H01L41/047 ; H03H9/17 ; H03H9/56

Abstract:
An elastic wave device in which a recess is provided on an upper side of a support, a piezoelectric thin film covers the recess, and an IDT electrode is provided on an upper surface of the piezoelectric thin film. A plate wave of an S0 mode or SH0 mode is used. A plurality of grooves are provided in the upper surface or lower surface of the piezoelectric thin film at a portion of the piezoelectric thin film that is positioned on a hollow section.
Public/Granted literature
- US20170358730A1 ELASTIC WAVE DEVICE Public/Granted day:2017-12-14
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