公开(公告)号：US12261585B2

公开(公告)日：2025-03-25

申请号：US17503415

申请日：2021-10-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto

IPC: H03H9/17 ,  H03H9/13

Abstract: An elastic wave device includes a piezoelectric layer including a first main surface and a second main surface facing the first main surface, an acoustically reflective layer stacked on the first main surface of the piezoelectric layer, an excitation electrode disposed on the piezoelectric layer, and a support layer. The acoustically reflective layer overlaps at least the excitation electrode in a plan view of the piezoelectric layer from the side of the second main surface. The support layer surrounds the acoustically reflective layer in a plan view of the piezoelectric layer from the side of the second main surface.

公开(公告)号：US12178132B2

公开(公告)日：2024-12-24

申请号：US17368907

申请日：2021-07-07

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Shinsuke Ikeuchi

IPC: H01L41/09 ,  H10N30/072 ,  H10N30/082 ,  H10N30/20 ,  H10N30/853 ,  H10N30/87

Abstract: In a piezoelectric device, a piezoelectric driving portion includes layers and is directly or indirectly supported by a base portion. The piezoelectric driving portion includes a piezoelectric layer, an upper electrode layer, and a lower electrode layer. The upper electrode layer is disposed on the upper side of the piezoelectric layer. The lower electrode layer faces at least a portion of the upper electrode layer with the piezoelectric layer interposed therebetween. The piezoelectric driving portion includes a through groove extending through the piezoelectric driving portion in the vertical direction, so that a pair of inner side surfaces are provided. The pair of inner side surfaces each include a first small-width portion in which the width of the through groove decreases in a downward direction from an upper end surface of the piezoelectric layer.

公开(公告)号：US11495728B2

公开(公告)日：2022-11-08

申请号：US16777925

申请日：2020-01-31

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Shinsuke Ikeuchi ,  Tetsuya Kimura ,  Katsumi Fujimoto ,  Yutaka Kishimoto ,  Fumiya Kurokawa ,  Yuzo Kishi

IPC: H01L41/047 ,  H01L41/053 ,  H01L41/08 ,  H01L41/083 ,  H01L41/09 ,  H01L41/297

Abstract: A piezoelectric device includes a piezoelectric body at least a portion of which can bend and vibrate, an upper electrode on an upper surface of the piezoelectric body and in which distortion of a crystal lattice is reduced as a distance from the upper surface of the piezoelectric body increases, a lower electrode on a lower surface of the piezoelectric body and in which distortion of a crystal lattice is reduced as a distance from the upper surface of the piezoelectric body increases, and a support substrate below the piezoelectric body, in which a recess extending from a lower surface of the support substrate toward the lower surface of the piezoelectric device is provided.

公开(公告)号：US10924080B2

公开(公告)日：2021-02-16

申请号：US16540143

申请日：2019-08-14

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Masashi Omura ,  Hiromu Okunaga

IPC: H03H9/02 ,  H03H9/17 ,  H03F3/20 ,  H03H3/02 ,  H03H9/05 ,  H04B1/40

Abstract: An acoustic wave device includes a supporting substrate, an acoustic reflection film the supporting substrate, a piezoelectric thin film on the acoustic reflection film, and an interdigital transducer electrode the piezoelectric thin film. The acoustic reflection film includes acoustic impedance layers including therein first, second, third, and fourth low acoustic impedance layers and first, second, and third high acoustic impedance layers. The acoustic reflection film includes a first acoustic impedance layer and a second acoustic impedance layer, the first and second acoustic impedance layers each being one of the acoustic impedance layers, and the second acoustic impedance layer has an arithmetic average roughness different from that of the first acoustic impedance layer.

公开(公告)号：US10862020B2

公开(公告)日：2020-12-08

申请号：US15591216

申请日：2017-05-10

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Tetsuya Kimura

IPC: H03H9/02 ,  H01L41/107 ,  H01L41/047 ,  H03H9/17 ,  H03H9/56

Abstract: An elastic wave device in which a recess is provided on an upper side of a support, a piezoelectric thin film covers the recess, and an IDT electrode is provided on an upper surface of the piezoelectric thin film. A plate wave of an S0 mode or SH0 mode is used. A plurality of grooves are provided in the upper surface or lower surface of the piezoelectric thin film at a portion of the piezoelectric thin film that is positioned on a hollow section.

公开(公告)号：US11832522B2

公开(公告)日：2023-11-28

申请号：US17205062

申请日：2021-03-18

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Fumiya Kurokawa ,  Shinsuke Ikeuchi ,  Yoichi Mochida ,  Seiji Umezawa ,  Nobuyoshi Adachi ,  Yutaka Kishimoto

IPC: H10N30/20 ,  H10N30/88 ,  H10N30/30 ,  H10N30/853 ,  H10N30/04

CPC classification number: H10N30/2041 ,  H10N30/304 ,  H10N30/8542 ,  H10N30/88 ,  H10N30/04

Abstract: A piezoelectric transducer includes beam portions each with a fixed end portion and extending in a direction away from the fixed end portion. A base portion is connected to the fixed end portion of each of the beam portions. The beam portions extends in a same plane, and respective extending directions of at least two beam portions are different from each other. The beam portions each include a single crystal piezoelectric layer having a polarization axis in a same direction, an upper electrode layer, and a lower electrode layer. A polarization axis has a polarization component in the plane. An axial direction of an orthogonal axis that is orthogonal to the polarization axis and extends in the above-described plane intersects with an extending direction of each of the plurality of beam portions.

公开(公告)号：US11784629B2

公开(公告)日：2023-10-10

申请号：US17161727

申请日：2021-01-29

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Shinsuke Ikeuchi ,  Katsumi Fujimoto ,  Tetsuya Kimura ,  Fumiya Kurokawa

IPC: H03H9/17 ,  H03H3/02 ,  H03H9/02 ,  H03H9/13

CPC classification number: H03H9/174 ,  H03H3/02 ,  H03H9/02031 ,  H03H9/02228 ,  H03H9/13 ,  H03H9/176 ,  H03H2003/023

Abstract: A piezoelectric device includes a membrane portion and a piezoelectric layer made of single crystal of a piezoelectric body. At least a portion of the piezoelectric layer is included in the membrane portion. An electrode is provided on a surface of the piezoelectric layer in the membrane portion. The piezoelectric layer includes a first polarization region in a first polarization state and a second polarization region in a second polarization state, and the first polarization region and the second polarization region are spaced apart from each other in a thickness direction or an in-plane direction.

公开(公告)号：US11738993B2

公开(公告)日：2023-08-29

申请号：US17332167

申请日：2021-05-27

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto

IPC: B81B1/00 ,  B81C1/00

CPC classification number: B81B1/002 ,  B81C1/00047 ,  B81B2203/0315 ,  B81C2201/0132 ,  B81C2203/036

Abstract: A silicon substrate having a first silicon substrate having a first surface with a cavity and a second surface opposite the first surface; a first silicon oxide film having a thickness d1 on the first surface; a second silicon oxide film having a thickness d2 on a bottom of the cavity; and a third silicon oxide film having a thickness d3 on the second surface, where d1≤d3 and d1

公开(公告)号：US11605775B2

公开(公告)日：2023-03-14

申请号：US16907400

申请日：2020-06-22

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto ,  Shinsuke Ikeuchi ,  Masayuki Suzuki ,  Fumiya Kurokawa

IPC: H01L41/083 ,  H01L41/047 ,  H01L41/18

Abstract: In a piezoelectric device, electrode layers are spaced apart from each other in the direction of the normal thereto. A first piezoelectric layer is interposed between two electrode layers of electrode layers in the direction of the normal. A second piezoelectric layer is provided on an opposite side of the first piezoelectric layer from a base portion. The second piezoelectric layer is interposed between two electrode layers of the electrode layers in the direction of the normal. The half-width of a rocking curve measured by X-ray diffraction for a lattice plane of the first piezoelectric layer substantially parallel to a first main surface is smaller than a half-width for the second piezoelectric layer. The piezoelectric constant of a material defining the first piezoelectric layer is smaller than the piezoelectric constant of a material defining the second piezoelectric layer.

公开(公告)号：US11152914B2

公开(公告)日：2021-10-19

申请号：US15679324

申请日：2017-08-17

Applicant: Murata Manufacturing Co., Ltd.

Inventor： Yutaka Kishimoto

IPC: H03H9/25 ,  H03H3/08 ,  H03H3/02 ,  H03H9/02 ,  H03H9/145 ,  H01L41/338 ,  H03H3/04 ,  H03H3/10 ,  H03H9/05 ,  H03H9/13 ,  H03H9/17

Abstract: An elastic wave device includes a piezoelectric layer including a first main surface and a second main surface facing the first main surface, an acoustically reflective layer stacked on the first main surface of the piezoelectric layer, an excitation electrode disposed on the piezoelectric layer, and a support layer. The acoustically reflective layer overlaps at least the excitation electrode in a plan view of the piezoelectric layer from the side of the second main surface. The support layer surrounds the acoustically reflective layer in a plan view of the piezoelectric layer from the side of the second main surface.