Invention Grant
- Patent Title: 3D microscope including insertable components to provide multiple imaging and measurement capabilities
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Application No.: US16056860Application Date: 2018-08-07
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Publication No.: US10884228B2Publication Date: 2021-01-05
- Inventor: James Jianguo Xu , Ken Kinsun Lee , Rusmin Kudinar , Ronny Soetarman , Hung Phi Nguyen , Zhen Hou
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Bever, Hoffman & Harms, LLP
- Main IPC: H04N7/18
- IPC: H04N7/18 ; G02B21/06 ; G02B21/00 ; G02B21/36
Abstract:
A three-dimensional (3D) microscope includes various insertable components that facilitate multiple imaging and measurement capabilities. These capabilities include Nomarski imaging, polarized light imaging, quantitative differential interference contrast (q-DIC) imaging, motorized polarized light imaging, phase-shifting interferometry (PSI), and vertical-scanning interferometry (VSI).
Public/Granted literature
- US20180356623A1 3D MICROSCOPE INCLUDING INSERTABLE COMPONENTS TO PROVIDE MULTIPLE IMAGING AND MEASUREMENT CAPABILITIES Public/Granted day:2018-12-13
Information query
