- 专利标题: Dynamic random access memory array, semiconductor layout structure and fabrication method thereof
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申请号: US16878481申请日: 2020-05-19
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公开(公告)号: US10885956B2公开(公告)日: 2021-01-05
- 发明人: Chih Cheng Liu
- 申请人: Changxin Memory Technologies, Inc.
- 申请人地址: CN Anhui
- 专利权人: Changxin Memory Technologies, Inc.
- 当前专利权人: Changxin Memory Technologies, Inc.
- 当前专利权人地址: CN Anhui
- 代理机构: Sheppard Mullin Richter & Hampton LLP
- 优先权: CN201711227178 20171129
- 主分类号: G11C7/12
- IPC分类号: G11C7/12 ; G11C8/14 ; H01L27/108
摘要:
A semiconductor layout structure for a dynamic random access memory (DRAM) array, comprising an isolation structure and a plurality of active areas situated in a semiconductor substrate, each of the active areas extending along a length-wise central axis. The isolation structure is situated among the active areas. The active areas are arranged in an array and comprise a plurality of first active areas and a plurality of second active areas. The first active areas are arranged along a first length-wise direction of the active areas. The second active areas are arranged along a second length-wise direction of the active areas. The first active areas are parallel and adjacent to the second active areas, and the first and second active areas are alternately distributed in a direction of word-lines. The first active area having a first width smaller than a second width of the second active area.
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