Invention Grant
- Patent Title: CBRAM by subtractive etching of metals
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Application No.: US16401693Application Date: 2019-05-02
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Publication No.: US10886467B2Publication Date: 2021-01-05
- Inventor: Hiroyuki Miyazoe , Qing Cao , Takashi Ando , John Rozen
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Randall Bluestone
- Main IPC: H01L29/02
- IPC: H01L29/02 ; H01L45/00

Abstract:
A method is presented for constructing conductive bridging random access memory (CBRAM) stacks. The method includes forming a plurality of conductive lines within an interlayer dielectric (ILD), forming a CBRAM stack including at least an electrolyte layer, a conductive layer, a metal cap layer, and a top electrode such that a top end of the CBRAM stack has a smaller critical dimension than a bottom end of the CBRAM stack, forming a low-k dielectric layer over the CBRAM stack, and exposing a top surface of the CBRAM stack during a via opening.
Public/Granted literature
- US20200350499A1 CBRAM BY SUBTRACTIVE ETCHING OF METALS Public/Granted day:2020-11-05
Information query
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