Invention Grant
- Patent Title: Magnetic property measuring system, a method for measuring magnetic properties, and a method for manufacturing a magnetic memory device using the same
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Application No.: US16411680Application Date: 2019-05-14
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Publication No.: US10892196B2Publication Date: 2021-01-12
- Inventor: Eunsun Noh
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Myers Bigel, P.A.
- Priority: KR10-2018-0125889 20181022
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L43/12 ; H01F41/34 ; H01L21/683 ; G01R33/032 ; H01F10/32 ; H01L27/22 ; G01R33/12 ; H01L43/02

Abstract:
A magnetic property measuring system includes a stage configured to hold a sample and a magnetic structure disposed over the stage. The stage includes a body part, a magnetic part adjacent the body part, and a plurality of holes defined in the body part. The magnetic part of the stage and the magnetic structure are configured to apply a magnetic field, which is perpendicular to one surface of the sample, to the sample. The stage is configured to move horizontally in an x-direction and a y-direction which are parallel to the one surface of the sample.
Information query
IPC分类: