Invention Grant
- Patent Title: Gas supply device capable of measuring flow rate, flowmeter, and flow rate measuring method
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Application No.: US16069126Application Date: 2017-01-12
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Publication No.: US10895484B2Publication Date: 2021-01-19
- Inventor: Yohei Sawada , Nobukazu Ikeda , Kouji Nishino , Masaaki Nagase
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Agency: Studebaker & Brackett PC
- Priority: JP2016-006622 20160115
- International Application: PCT/JP2017/000762 WO 20170112
- International Announcement: WO2017/122714 WO 20170720
- Main IPC: G01F3/38
- IPC: G01F3/38 ; G01F15/04 ; G01F1/34 ; G01F25/00 ; G05D7/06 ; G01F1/50 ; G01F17/00 ; G01F22/02

Abstract:
A gas supply system capable of flow measurement includes a flow controller that controls the flow rate of a flowing gas, a first shutoff valve provided downstream of the flow controller, a second shutoff valve provided in a first flow passage communicating with the downstream side of the first shutoff valve, a second flow passage that branches from the first flow passage, a third shutoff valve provided in the second flow passage, a pressure sensing device that detects a pressure in a flow passage controlled by the first, second, and third shutoff valves, a temperature sensing device that detects a temperature in the flow passage controlled by the first, second, and third shutoff valves, a volume measuring tank connected downstream of the third shutoff valve and having a known volume, and an arithmetic and control unit that obtains a passage volume controlled by the first, second, and third shutoff valves by applying Boyle's law to open and closed states of the third shutoff valve and calculates the flow rate of the flow controller, using the passage volume and detection values obtained by the pressure sensing device and the temperature sensing device.
Public/Granted literature
- US20190017855A1 GAS SUPPLY DEVICE CAPABLE OF MEASURING FLOW RATE, FLOWMETER, AND FLOW RATE MEASURING METHOD Public/Granted day:2019-01-17
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