-
公开(公告)号：US11692931B2
公开(公告)日：2023-07-04
申请号：US17598636
申请日：2020-03-31
申请人： FUJIKIN INCORPORATED
摘要： The concentration measurement device 100 includes an electric unit 20 having a light source 22 and a photodetector 24, a fluid unit 10 having a measurement cell 1, optical fibers 11 and 12 for connecting the electric unit 20 and the fluid unit 10 and is configured to measure the concentration of the fluid in the measurement cell by detecting the light incident from the light source 22 to the measurement cell and then emitted from the measurement cell by the photodetector 24, where optical connection parts 32 and 34 connected to the optical fibers 11, 12 and the light source 22 or the photodetector 24 are integrally provided in the electric unit 20.
-
公开(公告)号：US11519769B2
公开(公告)日：2022-12-06
申请号：US17264173
申请日：2019-07-16
申请人： FUJIKIN INCORPORATED
发明人： Masaaki Nagase , Satoru Yamashita , Masayoshi Kawashima , Masahiko Takimoto , Kouji Nishino , Nobukazu Ikeda
IPC分类号： G01F1/88
摘要： A control unit 3 of a flow rate control system 1 comprises: a recording unit 31 for recording measured values of a pressure sensor P and a temperature sensor T, a storage unit 32 for storing volume data between a first valve V1 and a second valve V2 corresponding to the measured value of the pressure sensor P, and an arithmetic unit 33 for calculating a flow rate based on a first pressure value P1 and a first temperature value T1 measured after opening the first valve V1 and the second valve V2 to flow a gas and then closing the first valve V1 and the second valve V2 simultaneously in a state where the gas is flowing; a second pressure value P2 and a second temperature value T2 measured after opening the first valve V1 and the second valve V2 to flow a gas, closing the second valve V2 in a state where the gas is flowing, and then closing the first valve V1 after a predetermined time Δt has elapsed; and a volume value V between the first valve V1 and the second valve V2 which corresponds to the second pressure value P2.
-
公开(公告)号：US11460869B2
公开(公告)日：2022-10-04
申请号：US16634603
申请日：2018-07-24
申请人： FUJIKIN INCORPORATED
摘要： A fluid control system (1) comprises: a first valve (21) provided downstream of a flow rate controller (10), a flow rate measuring device (30) provided downstream of the first valve (21) and having a second valve (22), an open/close detector (26) provided to the second valve (22), and a controller (25) for controlling an open/close operation of the first valve (21) and the second valve (22), and the controller (25) controls the open/close operation of the first valve (21) in response to a signal output from the open/close detector (26).
-
公开(公告)号：US10969259B2
公开(公告)日：2021-04-06
申请号：US16309697
申请日：2017-06-22
申请人： FUJIKIN INCORPORATED
发明人： Yohei Sawada , Masaaki Nagase , Kouji Nishino , Nobukazu Ikeda
摘要： In a method of calibrating a flow rate control device in which a flow rate is calibrated based on comparison with a flow rate measured by a flow rate reference gauge, a predetermined permissible error range is set for a plurality of flow rate settings, and the permissible error range of at least one specific flow rate setting among the plurality of flow rate settings is set to be smaller than the predetermined permissible error range.
-
5.发明授权公开(公告)号：US10895484B2
公开(公告)日：2021-01-19
申请号：US16069126
申请日：2017-01-12
申请人： FUJIKIN INCORPORATED
发明人： Yohei Sawada , Nobukazu Ikeda , Kouji Nishino , Masaaki Nagase
摘要： A gas supply system capable of flow measurement includes a flow controller that controls the flow rate of a flowing gas, a first shutoff valve provided downstream of the flow controller, a second shutoff valve provided in a first flow passage communicating with the downstream side of the first shutoff valve, a second flow passage that branches from the first flow passage, a third shutoff valve provided in the second flow passage, a pressure sensing device that detects a pressure in a flow passage controlled by the first, second, and third shutoff valves, a temperature sensing device that detects a temperature in the flow passage controlled by the first, second, and third shutoff valves, a volume measuring tank connected downstream of the third shutoff valve and having a known volume, and an arithmetic and control unit that obtains a passage volume controlled by the first, second, and third shutoff valves by applying Boyle's law to open and closed states of the third shutoff valve and calculates the flow rate of the flow controller, using the passage volume and detection values obtained by the pressure sensing device and the temperature sensing device.
-
公开(公告)号：US09983051B2
公开(公告)日：2018-05-29
申请号：US14889388
申请日：2014-04-25
申请人： FUJIKIN INCORPORATED
发明人： Masaaki Nagase , Ryousuke Dohi , Nobukazu Ikeda , Kouji Nishino , Michio Yamaji , Tadayuki Yakushijin
IPC分类号： G02B27/02 , G01J1/04 , G01J1/42 , G02B1/02 , G01N21/03 , G01N21/05 , G02B7/00 , G01J5/08 , G01J3/02 , G01N21/33 , G01J5/00
CPC分类号： G01J1/0403 , G01J1/0407 , G01J1/42 , G01J3/0205 , G01J5/0014 , G01J5/0875 , G01N21/0303 , G01N21/05 , G01N21/33 , G02B1/02 , G02B7/007 , G02B27/022 , G02B27/028
摘要： A fastening structure of a brittle-fracturable panel material includes a first fastening flange, a second fastening flange, and a light transmission window panel made of a brittle-fracturable panel material, wherein the light transmission window panel is nipped between the first fastening flange and the second fastening flange, and both fastening flanges are air-tightly fitted and fastened.
-
公开(公告)号：US20150322567A1
公开(公告)日：2015-11-12
申请号：US14650496
申请日：2013-11-20
申请人： FUJIKIN INCORPORATED
IPC分类号： C23C16/448 , F22B1/28 , F17C9/02
CPC分类号： C23C16/4485 , C23C16/4481 , C23C16/4482 , C23C16/52 , F17C9/02 , F22B1/284 , F22B1/285
摘要： The present invention provides a raw material vaporization and supply device including a raw material receiving tank, a vaporizer for vaporizing liquid pressure-fed from the liquid receiving tank, a flow rate control device for adjusting a flow rate of raw material gas from the vaporizer, and a heating device for heating the vaporizer, the high-temperature pressure-type flow rate control device, and desired sections of flow passages connected to these devices, wherein Al2O3 passivation treatment, Cr2O3 passivation treatment, or FeF2 passivation treatment is applied to liquid contact parts or gas contact parts of metal surfaces of at least any of the raw material receiving tank, the vaporizer, the flow rate control device, the flow passages that links these component devices, or opening-and-closing valves that are disposed in the flow passages.
摘要翻译： 本发明提供一种原料蒸发供给装置，其包括原料容纳槽，用于蒸发从液体接收罐供给的液体的蒸发器，用于调节来自蒸发器的原料气体的流量的流量控制装置， 以及用于加热蒸发器，高温压力型流量控制装置和连接到这些装置的流路的所需部分的加热装置，其中Al 2 O 3钝化处理，Cr 2 O 3钝化处理或FeF 2钝化处理被施加到液体接触 至少任何原料接收罐，蒸发器，流量控制装置，连接这些部件装置的流动通道或设置在流体中的开关阀的金属表面的零件或气体接触部分 段落。
-
公开(公告)号：US11914407B2
公开(公告)日：2024-02-27
申请号：US17605948
申请日：2020-04-16
申请人： FUJIKIN INCORPORATED
发明人： Kaoru Hirata , Keisuke Ideguchi , Shinya Ogawa , Katsuyuki Sugita , Masaaki Nagase , Kouji Nishino , Nobukazu Ikeda , Hiroyuki Ito
CPC分类号： G05D7/0635 , G01F1/363 , G01F15/005 , G01L13/06 , G01L19/08 , Y10T137/7761
摘要： The flow rate control device 10 includes a control valve 11, a restriction part 12 provided downstream of the control valve 11, an upstream pressure sensor 13 for measuring a pressure P1 between the control valve 11 and the restriction part 12, a differential pressure sensor 20 for measuring a differential pressure ΔP between the upstream and the downstream of the restriction part 12, and an arithmetic control circuit 16 connected to the control valve 11, the upstream pressure sensor 13, and the differential pressure sensor 20.
-
公开(公告)号：US11796458B2
公开(公告)日：2023-10-24
申请号：US17423500
申请日：2020-01-21
申请人： FUJIKIN INCORPORATED
IPC分类号： G01N21/3504
CPC分类号： G01N21/3504 , G01N2201/062 , G01N2201/1211 , G01N2201/1218
摘要： A Concentration measurement device 100 comprises: a measurement cell 4 having a flow path through which a gas flows, a light source 1 for generating incident light to the measurement cell, a photodetector 7 for detecting light emitted from the measurement cell, a pressure sensor 20 for detecting a pressure of the gas in the measurement cell, a temperature sensor 22 for detecting a temperature of the gas in the measurement cell, and an arithmetic circuit 8 for calculating a concentration of the gas based on an output P of the pressure sensor, an output T of the temperature sensor, an output I of the photodetector, and an extinction coefficient α, wherein the arithmetic circuit 8 is configured to calculate the concentration using the extinction coefficient α determined on the basis of the output of the temperature sensor 22.
-
10.发明授权公开(公告)号：US11313756B2
公开(公告)日：2022-04-26
申请号：US16063794
申请日：2016-12-15
申请人： FUJIKIN INCORPORATED
发明人： Masaaki Nagase , Kaoru Hirata , Yohei Sawada , Kouji Nishino , Nobukazu Ikeda
摘要： An abnormality detection method performed using a flow rate control device including a restriction portion, a control valve, a first pressure sensor, a second pressure sensor, and a downstream valve, includes a step of changing the control valve and the downstream valve from an open state to a closed state, a step of measuring an upstream pressure or a downstream pressure in the closed state, and at least one step of (a) extracting an upstream pressure at a point when a difference between the upstream pressure and the downstream pressure reaches a predetermined value as an upstream convergence pressure, and extracting the downstream pressure as a downstream convergence pressure, and (b) extracting the time from a point when the control valve are changed to a closed state to a point when a difference between the upstream pressure and the downstream pressure reaches a predetermined value as a convergence time.
-
-
-
-
-
-
-
-
-
搜索结果
57 条记录 (耗时 0.017 秒)
