- 专利标题: Gas supply device capable of measuring flow rate, flowmeter, and flow rate measuring method
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申请号: US16069126申请日: 2017-01-12
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公开(公告)号: US10895484B2公开(公告)日: 2021-01-19
- 发明人: Yohei Sawada , Nobukazu Ikeda , Kouji Nishino , Masaaki Nagase
- 申请人: FUJIKIN INCORPORATED
- 申请人地址: JP Osaka
- 专利权人: FUJIKIN INCORPORATED
- 当前专利权人: FUJIKIN INCORPORATED
- 当前专利权人地址: JP Osaka
- 代理机构: Studebaker & Brackett PC
- 优先权: JP2016-006622 20160115
- 国际申请: PCT/JP2017/000762 WO 20170112
- 国际公布: WO2017/122714 WO 20170720
- 主分类号: G01F3/38
- IPC分类号: G01F3/38 ; G01F15/04 ; G01F1/34 ; G01F25/00 ; G05D7/06 ; G01F1/50 ; G01F17/00 ; G01F22/02
摘要:
A gas supply system capable of flow measurement includes a flow controller that controls the flow rate of a flowing gas, a first shutoff valve provided downstream of the flow controller, a second shutoff valve provided in a first flow passage communicating with the downstream side of the first shutoff valve, a second flow passage that branches from the first flow passage, a third shutoff valve provided in the second flow passage, a pressure sensing device that detects a pressure in a flow passage controlled by the first, second, and third shutoff valves, a temperature sensing device that detects a temperature in the flow passage controlled by the first, second, and third shutoff valves, a volume measuring tank connected downstream of the third shutoff valve and having a known volume, and an arithmetic and control unit that obtains a passage volume controlled by the first, second, and third shutoff valves by applying Boyle's law to open and closed states of the third shutoff valve and calculates the flow rate of the flow controller, using the passage volume and detection values obtained by the pressure sensing device and the temperature sensing device.
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