Invention Grant
- Patent Title: Capacitive position sensing for capacitive drive MEMS devices
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Application No.: US16221523Application Date: 2018-12-16
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Publication No.: US10908361B2Publication Date: 2021-02-02
- Inventor: Sebastian Fluegel , Andrew J. Sutton , Bryce T Bradford , Yuval Gerson
- Applicant: APPLE INC.
- Applicant Address: US CA Cupertino
- Assignee: APPLE INC.
- Current Assignee: APPLE INC.
- Current Assignee Address: US CA Cupertino
- Agency: Kligler & Associates Patent Attorneys Ltd
- Main IPC: G02B6/35
- IPC: G02B6/35 ; G02B26/08 ; G01P15/125

Abstract:
An apparatus for driving and position sensing in a comb-drive actuator includes a generator, a driver circuit, sensing circuitry, and signal processing circuitry. The generator is configured to apply a sensing-voltage to a first electrode of the comb-drive actuator. The driver circuit is configured to apply a drive-voltage to a second electrode of the comb-drive actuator, having an opposite polarity relative to the first electrode. The sensing circuitry is configured to measure at the second electrode a sensed-waveform resulting from the sensing-voltage applied to the first electrode. The signal processing circuitry is configured to estimate a position of the first electrode relative to the second electrode based on the sensed-waveform.
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