Invention Grant
- Patent Title: System, method and apparatus for polarization control
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Application No.: US16005333Application Date: 2018-06-11
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Publication No.: US10921488B2Publication Date: 2021-02-16
- Inventor: Ivan Maleev , Donald Pettibone
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Suiter Swantz pc llc
- Main IPC: G02B1/02
- IPC: G02B1/02 ; G01N21/88 ; G01N21/95 ; G02B27/28 ; G02B5/30

Abstract:
A polarization control device includes a first wave plate having a first surface profile and a second wave plate having a second surface profile complementary to the first surface profile. The optical axis of the first wave plate is orthogonal to the optical axis of the second wave plate. The first wave plate and the second wave plate are positioned to align the first surface profile with the second surface profile and maintain a constant thickness across the polarization control device. The first wave plate and the second wave plate may control polarization rotation as a continuous function of transverse position across a pupil plane of an optical system. The first wave plate and the second wave plate are separated by a sufficiently small distance so as to limit wave front distortion below a selected level.
Public/Granted literature
- US20180292574A1 System, Method and Apparatus For Polarization Control Public/Granted day:2018-10-11
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