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公开(公告)号：US20130335736A1
公开(公告)日：2013-12-19
申请号：US13916334
申请日：2013-06-12
Applicant: KLA-Tencor Corporation
Inventor： Ivan Maleev
IPC: G01N21/25
CPC classification number: G01N21/255 , G01N21/4788 , G01N21/9501 , G03F7/70625
Abstract: An optical scanning system may include a moving sample positioning stage that supports the sample during an optical measurement of the sample using the light source and the spectrometer. The moving sample positioning stage may move the sample in at least one direction during the optical measurement of the sample. A scatterometer system may include collection imaging optics for imaging the reflected light onto a multi-pixel sensor that collects and analyze the reflected light.
Abstract translation: 光学扫描系统可以包括移动的样品定位台，其在使用光源和光谱仪的样品的光学测量期间支撑样品。 移动的样品定位台可以在样品的光学测量期间沿至少一个方向移动样品。 散射仪系统可以包括用于将反射光成像到收集和分析反射光的多像素传感器上的收集成像光学器件。
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公开(公告)号：US09494531B2
公开(公告)日：2016-11-15
申请号：US14455161
申请日：2014-08-08
Applicant: KLA-Tencor Corporation
Inventor： Yung-Ho Alex Chuang , Xiaoxu Lu , John Fielden , Ivan Maleev
CPC classification number: G01N21/9501 , G01J1/04 , G01N21/8806
Abstract: Methods and systems for minimizing interference among multiple illumination beams generated from a non-uniform illumination source to provide an effectively uniform illumination profile over the field of view of an inspection system are presented. In some examples, a pulsed beam of light is split into multiple illumination beams such that each of the beams are temporally separated at the surface of the specimen under inspection. In some examples, multiple illumination beams generated from a non-uniform illumination source are projected onto spatially separated areas on the surface of the specimen. A point object of interest illuminated by each area is imaged onto the surface of a time-delay integration (TDI) detector. The images are integrated such that the relative position of the illumination areas along the direction of motion of the point object of interest has no impact on the illumination efficiency distribution over the field of view.
Abstract translation: 提出了用于最小化从不均匀照明源产生的多个照明光束之间的干扰的方法和系统，以在检查系统的视场上提供有效均匀的照明轮廓。 在一些示例中，脉冲光束被分成多个照明光束，使得每个光束在被检查的样品的表面处在时间上分离。 在一些示例中，从不均匀照明源产生的多个照明光束投影到样本表面上的空间分离的区域上。 由每个区域照明的感兴趣的点对象被成像到时间延迟积分（TDI）检测器的表面上。 图像被集成为使得照明区域沿着感兴趣点对象的运动方向的相对位置对视场的照明效率分布没有影响。
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公开(公告)号：US09182341B2
公开(公告)日：2015-11-10
申请号：US13916334
申请日：2013-06-12
Applicant: KLA-Tencor Corporation
Inventor： Ivan Maleev
CPC classification number: G01N21/255 , G01N21/4788 , G01N21/9501 , G03F7/70625
Abstract: An optical scanning system may include a moving sample positioning stage that supports the sample during an optical measurement of the sample using the light source and the spectrometer. The moving sample positioning stage may move the sample in at least one direction during the optical measurement of the sample. A scatterometer system may include collection imaging optics for imaging the reflected light onto a multi-pixel sensor that collects and analyze the reflected light.
Abstract translation: 光学扫描系统可以包括移动的样品定位台，其在使用光源和光谱仪的样品的光学测量期间支撑样品。 移动的样品定位台可以在样品的光学测量期间沿至少一个方向移动样品。 散射仪系统可以包括用于将反射光成像到收集和分析反射光的多像素传感器上的收集成像光学器件。
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公开(公告)号：US20150041666A1
公开(公告)日：2015-02-12
申请号：US14455161
申请日：2014-08-08
Applicant: KLA-Tencor Corporation
Inventor： Yung-Ho Alex Chuang , Xiaoxu Lu , John Fielden , Ivan Maleev
CPC classification number: G01N21/9501 , G01J1/04 , G01N21/8806
Abstract: Methods and systems for minimizing interference among multiple illumination beams generated from a non-uniform illumination source to provide an effectively uniform illumination profile over the field of view of an inspection system are presented. In some examples, a pulsed beam of light is split into multiple illumination beams such that each of the beams are temporally separated at the surface of the specimen under inspection. In some examples, multiple illumination beams generated from a non-uniform illumination source are projected onto spatially separated areas on the surface of the specimen. A point object of interest illuminated by each area is imaged onto the surface of a time-delay integration (TDI) detector. The images are integrated such that the relative position of the illumination areas along the direction of motion of the point object of interest has no impact on the illumination efficiency distribution over the field of view.
Abstract translation: 提出了用于最小化从不均匀照明源产生的多个照明光束之间的干扰的方法和系统，以在检查系统的视场上提供有效均匀的照明轮廓。 在一些示例中，脉冲光束被分成多个照明光束，使得每个光束在被检查的样品的表面处在时间上分离。 在一些示例中，从不均匀照明源产生的多个照明光束投影到样本表面上的空间分离的区域上。 由每个区域照明的感兴趣的点对象被成像到时间延迟积分（TDI）检测器的表面上。 图像被集成为使得照明区域沿着感兴趣点对象的运动方向的相对位置对视场的照明效率分布没有影响。
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公开(公告)号：US20140361152A1
公开(公告)日：2014-12-11
申请号：US14296425
申请日：2014-06-04
Applicant: KLA-Tencor Corporation
Inventor： Ivan Maleev , Donald Pettibone
CPC classification number: G02B1/02 , G01N21/8806 , G01N21/9501 , G01N2021/8848 , G02B5/3083 , G02B27/286
Abstract: A polarization control device includes a first wave plate having a first surface profile and a second wave plate having a second surface profile complimentary to the first surface profile. The optical axis of the first wave plate is orthogonal to the optical axis of the second wave plate. The first wave plate and the second wave plate are positioned to align the first surface profile with the second surface profile and maintain a constant thickness across the polarization control device. The first wave plate and the second wave plate may control polarization rotation as a continuous function of transverse position across a pupil plane of an optical system. The first wave plate and the second wave plate are separated by a sufficiently small distance so as to limit wave front distortion below a selected level.
Abstract translation: 偏振控制装置包括具有第一表面轮廓的第一波片和具有与第一表面轮廓互补的第二表面轮廓的第二波片。 第一波片的光轴与第二波片的光轴正交。 第一波片和第二波片被定位成使第一表面轮廓与第二表面轮廓对准，并且在偏振控制装置上保持恒定的厚度。 第一波片和第二波片可以将偏振旋转控制为跨越光学系统的光瞳平面的横向位置的连续函数。 第一波片和第二波片被分开足够小的距离，以将波前失真限制在低于选定水平。
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Patent Agency Ranking
公开(公告)号：US20180292574A1
公开(公告)日：2018-10-11
申请号：US16005333
申请日：2018-06-11
Applicant: KLA-Tencor Corporation
Inventor： Ivan Maleev , Donald Pettibone
Abstract: A polarization control device includes a first wave plate having a first surface profile and a second wave plate having a second surface profile complementary to the first surface profile. The optical axis of the first wave plate is orthogonal to the optical axis of the second wave plate. The first wave plate and the second wave plate are positioned to align the first surface profile with the second surface profile and maintain a constant thickness across the polarization control device. The first wave plate and the second wave plate may control polarization rotation as a continuous function of transverse position across a pupil plane of an optical system. The first wave plate and the second wave plate are separated by a sufficiently small distance so as to limit wave front distortion below a selected level.
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公开(公告)号：US20180164228A1
公开(公告)日：2018-06-14
申请号：US15882946
申请日：2018-01-29
Applicant: KLA-Tencor Corporation
Inventor： Anatoly Romanovsky , Ivan Maleev , Daniel Kavaldjiev , Yury Yuditsky , Dirk Woll , Stephen Biellak , Mehdi Vaez-Iravani , Guoheng Zhao
IPC: G01N21/95 , G01N21/47 , G01N21/956 , G01N21/88
CPC classification number: G01N21/9501 , G01N21/47 , G01N21/8806 , G01N21/8851 , G01N21/956
Abstract: Systems configured to inspect a wafer are provided. One system includes an illumination subsystem configured to direct pulses of light to an area on a wafer; a scanning subsystem configured to scan the pulses of light across the wafer; a collection subsystem configured to image pulses of light scattered from the area on the wafer to a sensor, wherein the sensor is configured to integrate a number of the pulses of scattered light that is fewer than a number of the pulses of scattered light that can be imaged on the entire area of the sensor, and wherein the sensor is configured to generate output responsive to the integrated pulses of scattered light; and a computer subsystem configured to detect defects on the wafer using the output generated by the sensor.
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公开(公告)号：US09995850B2
公开(公告)日：2018-06-12
申请号：US14296425
申请日：2014-06-04
Applicant: KLA-Tencor Corporation
Inventor： Ivan Maleev , Donald Pettibone
CPC classification number: G02B1/02 , G01N21/8806 , G01N21/9501 , G01N2021/8848 , G02B5/3083 , G02B27/286
Abstract: A polarization control device includes a first wave plate having a first surface profile and a second wave plate having a second surface profile complementary to the first surface profile. The optical axis of the first wave plate is orthogonal to the optical axis of the second wave plate. The first wave plate and the second wave plate are positioned to align the first surface profile with the second surface profile and maintain a constant thickness across the polarization control device. The first wave plate and the second wave plate may control polarization rotation as a continuous function of transverse position across a pupil plane of an optical system. The first wave plate and the second wave plate are separated by a sufficiently small distance so as to limit wave front distortion below a selected level.
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公开(公告)号：US09891177B2
公开(公告)日：2018-02-13
申请号：US14506321
申请日：2014-10-03
Applicant: KLA-Tencor Corporation
Inventor： Jijen Vazhaeparambil , Guoheng Zhao , Daniel Kavaldjiev , Anatoly Romanovsky , Ivan Maleev , Christian Wolters , Stephen Biellak , Bret Whiteside , Donald Pettibone , Yung-Ho Alex Chuang , David W. Shortt
IPC: G01N21/88 , G01N21/95 , G06T7/00 , G01N21/956
CPC classification number: G01N21/8851 , G01N21/9501 , G01N21/956 , G01N2021/8887 , G01N2021/8896 , G01N2201/06113 , G01N2201/103 , G01N2201/12 , G06T7/0004 , G06T2207/10004 , G06T2207/30148
Abstract: A wafer scanning system includes imaging collection optics to reduce the effective spot size. Smaller spot size decreases the number of photons scattered by the surface proportionally to the area of the spot. Air scatter is also reduced. TDI is used to produce a wafer image based on a plurality of image signals integrated over the direction of linear motion of the wafer. An illumination system floods the wafer with light, and the task of creating the spot is allocated to the imaging collection optics.
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公开(公告)号：US20160097727A1
公开(公告)日：2016-04-07
申请号：US14506321
申请日：2014-10-03
Applicant: KLA-Tencor Corporation
Inventor： Jijen Vazhaeparambil , Guoheng Zhao , Daniel Kavaldjiev , Anatoly Romanovsky , Ivan Maleev , Christian Wolters , Stephen Biellak , Bret Whiteside , Donald Pettibone , Yung-Ho Alex Chuang , David W. Shortt
CPC classification number: G01N21/8851 , G01N21/9501 , G01N21/956 , G01N2021/8887 , G01N2021/8896 , G01N2201/06113 , G01N2201/103 , G01N2201/12 , G06T7/0004 , G06T2207/10004 , G06T2207/30148
Abstract: A wafer scanning system includes imaging collection optics to reduce the effective spot size. Smaller spot size decreases the number of photons scattered by the surface proportionally to the area of the spot. Air scatter is also reduced. TDI is used to produce a wafer image based on a plurality of image signals integrated over the direction of linear motion of the wafer. An illumination system floods the wafer with light, and the task of creating the spot is allocated to the imaging collection optics.
Abstract translation: 晶片扫描系统包括成像采集光学器件以减少有效光斑尺寸。 较小的斑点尺寸使得表面散射的光子数量与斑点的面积成比例地减小。 空气散射也减少。 TDI用于基于在晶片的线性运动方向上积分的多个图像信号产生晶片图像。 照明系统用光淹没晶片，创建光斑的任务被分配给成像采集光学元件。
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